Constant current diode formed by grooving process and manufacturing method thereof

Abstract

The invention provides a constant current diode formed by a grooving process. The constant current diode comprises a substrate, an epitaxial layer, a first insulating layer, a second insulating layer, a P+ isolation region, P+ polycrystalline silicon filled deep grooves, shallow P regions, a cathode and an anode, wherein the epitaxial layer is positioned on the front face of the substrate; the first insulating layer is provided with a first window and a second window and covers the surface of the epitaxial layer; the second insulating layer is adjacent to the first insulating layer and positioned on the surface of the epitaxial layer; the P+ isolation region is formed in the epitaxial layer and the two ends of the P+ isolation region are respectively connected with the substrate and the second insulating layer; the P+ polycrystalline silicon filled deep grooves are formed in the epitaxial layer corresponding to the first window; the shallow P region is formed outside each P+ polycrystalline silicon filled deep groove; the N+ region is positioned on the epitaxial layer corresponding to the second window and positioned between the two adjacent P+ polycrystalline silicon filled deep grooves; the cathode is positioned on the first window, the second window and the first insulating layer; and the anode is positioned on the back face of the substrate away from the epitaxial layer. The invention further provides a manufacturing method for the constant current diode formed by the grooving process, so as to solve the problem that current intensity per unit area and constant current characteristic cannot be simultaneously taken into account in the prior art.

Description

technical field [0001] The invention belongs to the technical field of semiconductor manufacturing technology, and in particular relates to a constant-current diode formed by a groove-cutting technology and a manufacturing method thereof. Background technique [0002] A constant current diode is a two-terminal constant current device made of silicon material. The constant current diode conducts forward to constant current and reverses to cut off. When the constant current diode is connected to the circuit loop according to the polarity and outputs a constant current when it is forward-conducting, the loop can achieve the effect of constant current, and the application is simple. Therefore, constant current diodes are widely used in electronic circuits such as AC and DC amplifiers, DC regulated power supplies, waveform generators, and protection circuits. [0003] Generally, the constant current diode adopts a planar channel junction field effect transistor (JFET) structure...

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Problems solved by technology

[0005] The object of the present invention is to provide a constant current diode formed by groove cutting process and its manufacturing method, so

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