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Giant magnetostrictive micro-displacement self-sensing driving method and actuator

A technology of giant magnetostriction and driving method, applied in the direction of control using feedback, can solve problems such as the influence of interference force, and achieve the effects of improving measurement accuracy, positioning accuracy, and suppressing nonlinearity

Inactive Publication Date: 2013-04-17
HARBIN INST OF TECH
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0011] The purpose of the present invention is to address the deficiencies in the above-mentioned prior art, and propose a giant magnetostrictive micro-displacement self-sensing driving method and actuator device, which solves the problem of the influence of interference force in the giant magnetostrictive micro-displacement driving process

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  • Giant magnetostrictive micro-displacement self-sensing driving method and actuator

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Embodiment Construction

[0028] A giant magnetostrictive micro-displacement self-sensing driving method, the implementation steps of the method will be described in detail below in conjunction with the accompanying drawings:

[0029] In the first step, the constant current source amplifying circuit 7 provides excitation current for the cylindrical coil 2 of the giant magnetostrictive actuator to make it generate a uniform magnetic field. When the driving magnetic field is stable, the giant magnetostrictive rod 3 produces a stretching effect to make the super The output displacement of the magnetostrictive micro-displacement driver, at this time, the equivalent resistance R of the energized cylindrical coil 2 1 and inductance L 1 A certain voltage division is generated in the drive circuit;

[0030] In the second step, the inductance bridge circuit 1 for measuring the inductance variation of the cylindrical coil 2 is integrated on the basis of the constant current source amplifier circuit 7, and the dri...

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Abstract

The invention provides a giant magnetostrictive micro-displacement self-sensing driving method and an actuator, belongs to the field of ultra-precise machining and measurement, and particularly relates to a rapid ultra-precise positioning motion control method and device. The giant magnetostrictive micro-displacement self-sensing driving method can realize self-sensing of force by measuring inductance of a coil through magnetic conductivity variation of a giant magnetostrictive material, namely inductance of an exciting coil, caused by an external force, based on an inverse magnetostrictive effect. According to the giant magnetostrictive micro-displacement self-sensing driving method provided by the invention, the inductance of the exciting coil can be measured by an inductance bridge, so that matched inductive reactance and impedance can be adjusted, and the bridge is balanced. The bridge is not balanced when being stressed by disturbance of the external force, and an inductance value variation of the exciting coil can be obtained by measuring unbalanced voltage through differential motion and operational amplification, so that a disturbing force can be obtained. The actuator mainly consists of a cylindrical magnetostrictive rod, the exiting coil, an elastic membrane and a water cooling sleeve. According to the giant magnetostrictive micro-displacement self-sensing driving method provided by the invention, the cylindrical coil not only provides a driving magnetic field but also is used as a sensor for measuring the disturbing force. In a high-speed ultra-precise positioning motion process, the error interference generated by the external disturbing force is reduced.

Description

technical field [0001] The invention belongs to the field of ultra-precision machining and measurement, in particular to a giant magnetostrictive micro-displacement self-sensing driving method and an actuator. Background technique [0002] For fast nanometer or subnanometer micro-displacement positioning drive, the reaction force disturbance generated by acceleration and deceleration is one of the main factors restricting its positioning accuracy. The giant magnetostrictive micro-drive method based on the separation and compensation mechanism of this variable force disturbance will be an effective means to solve this problem. This driving method mainly senses the variable force disturbance based on the working mechanism of the giant magnetostrictive micro-drive, and then separates and compensates with high precision to realize high-speed, high acceleration and deceleration nano or sub-nanometer positioning drive. [0003] Micro-displacement drive technology, nanometer or su...

Claims

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Application Information

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IPC IPC(8): G05D3/12
Inventor 王雷谭久彬
Owner HARBIN INST OF TECH
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