The invention provides a giant magnetostrictive micro-displacement self-sensing driving method and an
actuator, belongs to the field of ultra-precise
machining and measurement, and particularly relates to a rapid ultra-precise positioning
motion control method and device. The giant magnetostrictive micro-displacement self-sensing driving method can realize self-sensing of force by measuring
inductance of a coil through magnetic
conductivity variation of a giant magnetostrictive material, namely
inductance of an exciting coil, caused by an external force, based on an
inverse magnetostrictive effect. According to the giant magnetostrictive micro-displacement self-sensing driving method provided by the invention, the
inductance of the exciting coil can be measured by an inductance bridge, so that matched inductive
reactance and impedance can be adjusted, and the bridge is balanced. The bridge is not balanced when being stressed by disturbance of the external force, and an inductance value variation of the exciting coil can be obtained by measuring unbalanced
voltage through
differential motion and operational amplification, so that a disturbing force can be obtained. The
actuator mainly consists of a cylindrical magnetostrictive rod, the exiting coil, an
elastic membrane and a
water cooling sleeve. According to the giant magnetostrictive micro-displacement self-sensing driving method provided by the invention, the cylindrical coil not only provides a driving
magnetic field but also is used as a sensor for measuring the disturbing force. In a high-speed ultra-precise positioning motion process, the error interference generated by the external disturbing force is reduced.