Micro-pump based on super-magnetostrictive film driver

Abstract

The invention discloses a micro-pump based on a super-magnetostrictive film driver. The micro-pump comprises a lower pump body (1), a substrate (6) and an upper pump body (9), wherein the substrate (6) and the upper pump body (9) are laminated on the lower pump body (1) in sequence; a film (8) with a positive magnetostrictive effect is plated on the upper side of the substrate (6) and a film (12) with a converse magnetostrictive effect is plated on the lower side of the substrate (6); a pump cavity (4) and a valve cavity (11) are formed by the bottom surface of the substrate (6) and the lower pump body; the pump cavity (4) is communicated with the valve cavity (11) through a through hole; the pump cavity is connected with a liquid inlet pipeline (3), and the valve cavity is connected with a liquid outlet pipeline (13); the pump cavity and the valve cavity are respectively provided with a valve diaphragm of a cantilever valve structure; a coil rack (5) is arranged outside the pump body and is wound with a drive coil (7); and the films with magnetostrictive effect drive the substrate (6) to sway vertically under the action of a magnetic field, so that liquid inside the pump cavity (4) is pressed to circularly flow in a unidirectional direction. The micro-pump provided by the invention has the characteristics of large output pressure, high driving frequency, strong controllability and the like.

Description

technical field [0001] The invention relates to a micropump, in particular to a micropump using a magnetostrictive film as a driving material. Background technique [0002] As the core part of the microfluidic system, the micropump has a very broad application prospect in the fields of micro-flow delivery and release of drugs, micro-liquid sampling, micro-injection of oil, cell separation, cooling of integrated electronic components, micro-chemical analysis, and aerospace. At present, the driving principles of mechanical thin-film micropumps that have been studied more include piezoelectricity, electrostatics, electromagnetics, thermopneumatics, thermal flow, bimetallic effect and shape memory effect. Piezoelectric, electrostatic, and electromagnetic types belong to high-frequency drive, with large flow rate and wide application, but the drive voltage is too high, usually hundreds of volts, and it is difficult to match the control voltage of IC circuit. The thermopneumatic,...

AI Technical Summary

Problems solved by technology

Piezoelectric, electrostatic, and electromagnetic types belong to high-frequency drive, with large flow rate and wide application, but the drive voltage is too high, usually hundreds of volts, and it is difficult to match the control voltage of IC circuit

The thermopneumatic, thermal flow, bimetallic effect and shape memory effect drivers have lower driving frequency, and the output flow is also smaller

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