Voltage-control adjustable film inductor

A technology of thin film and inductance, applied in the manufacture of inductors/transformers/magnets, piezoelectric/electrostrictive/magnetostrictive devices, circuits, etc., can solve problems such as difficulty in adjusting the inductance value, and achieve saving development costs and time, accurate The effect of impedance matching

Inactive Publication Date: 2007-02-28
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, it is quite difficult to adjust the inductance value by relying on traditional thin film inductors

Method used

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  • Voltage-control adjustable film inductor
  • Voltage-control adjustable film inductor
  • Voltage-control adjustable film inductor

Examples

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Embodiment Construction

[0019] In order to illustrate the design method of the present invention in more detail, specific examples are as follows:

[0020] The substrate (1) is made of lead zirconate titanate piezoelectric ceramic material, and the substrate electrode (2) is made of metal aluminum interdigitated electrodes with a thickness of 1 micron, prepared by DC magnetron sputtering method; the insulating layer (3) is made of polyimide Material, thickness is 1 micron, adopts radio frequency magnetron sputtering method to prepare; Thin film inductor (4) adopts the gate type thin film inductor of usual " magnetic thin film / insulating layer / metal wire ", and wherein magnetic thin film material is FeCoSiB amorphous thin film , the insulating layer is polyimide material, and the metal wire material is Cu.

[0021] When a voltage of 0-55V is applied to the "+" and "-" ends of the base electrode (2) of the prepared voltage-controlled adjustable thin-film inductor, the measured inductance value of the t...

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Abstract

The invention relates to a voltage-control adjustable film inductance. Wherein, on the piezoelectric ceramic substrate, it prepares film inductance with magnetic layer; uses the inverse piezoelectric effect of piezoelectric ceramic and the inverse magnetic flexible effect of magnetic film, via external voltage, to adjust the deformation of substrate and change the magnetic conductivity of magnetic film, to adjust the inductance. The invention can be used in movable communicator, T/R element, GPS, etc.

Description

technical field [0001] The invention belongs to the technical field of solid electronic devices, and particularly relates to the design technology of thin film inductors, more precisely, relates to the technology of designing heterogeneous structure thin film inductors by using piezoelectric ceramics. Background technique [0002] Inductors are widely used in many electronic devices such as filters, tuners, oscillators, impedance matching and other devices. With the development of integration and miniaturization of electronic devices and systems, thin film inductors are widely used in these micro devices. In these application fields of thin film inductors, thin film inductors with adjustable inductance characteristics play a very important role in electronic device applications. For example, an LC filter with adjustable center frequency can be constructed by using adjustable film inductors and capacitors, so that the LC filter can work at different frequencies required with...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L41/00H01F41/00
Inventor 张万里彭斌蒋洪川张文旭杨仕清
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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