Biplane oil driven micropump based on giant magnetostrictive film driver
A giant magnetostrictive and coil-driven technology, applied to pumps with flexible working elements, pumps, machines/engines, etc., can solve the problems of insufficient magnetic field strength, low performance and low efficiency of micro-pumps, and achieve load capacity Strong, avoid frequency doubling effect, low noise effect
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[0030] The present invention is described further below:
[0031] combine figure 1 , figure 2 : A double planar coil-driven micropump based on a giant magnetostrictive film driver, including a pump body, a substrate 7 that divides the pump body into upper and lower pump bodies, and an upper plane spiral coil is provided on the upper surface of the upper pump body 8 9. The upper plane spiral coil 9 is electrically connected to the external AC power supply through the upper coil electrode pair lead wire 13, the upper surface of the substrate 7 is provided with a positive magnetostrictive effect film 12, and the lower surface is provided with a reverse magnetostrictive effect film 17; The pump body is provided with a liquid inlet 6 and a liquid outlet 15. The pump body is provided with a valve chamber 14. The substrate 7 and the upper pump body 8 form an upper liquid chamber 11, and the substrate 7 and the lower pump body 4 form a lower liquid chamber. 3. The liquid inlet 6 an...
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