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Biplane oil driven micropump based on giant magnetostrictive film driver

A giant magnetostrictive and coil-driven technology, applied to pumps with flexible working elements, pumps, machines/engines, etc., can solve the problems of insufficient magnetic field strength, low performance and low efficiency of micro-pumps, and achieve load capacity Strong, avoid frequency doubling effect, low noise effect

Inactive Publication Date: 2015-02-18
ANHUI UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In this technical solution, there is only one liquid cavity, and the liquid suction and liquid discharge are carried out separately, so the efficiency is low; and only one planar helical coil is used, the magnetic field strength generated is not enough, and the working performance of the micropump is low

Method used

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  • Biplane oil driven micropump based on giant magnetostrictive film driver
  • Biplane oil driven micropump based on giant magnetostrictive film driver

Examples

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Embodiment Construction

[0030] The present invention is described further below:

[0031] combine figure 1 , figure 2 : A double planar coil-driven micropump based on a giant magnetostrictive film driver, including a pump body, a substrate 7 that divides the pump body into upper and lower pump bodies, and an upper plane spiral coil is provided on the upper surface of the upper pump body 8 9. The upper plane spiral coil 9 is electrically connected to the external AC power supply through the upper coil electrode pair lead wire 13, the upper surface of the substrate 7 is provided with a positive magnetostrictive effect film 12, and the lower surface is provided with a reverse magnetostrictive effect film 17; The pump body is provided with a liquid inlet 6 and a liquid outlet 15. The pump body is provided with a valve chamber 14. The substrate 7 and the upper pump body 8 form an upper liquid chamber 11, and the substrate 7 and the lower pump body 4 form a lower liquid chamber. 3. The liquid inlet 6 an...

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Abstract

The invention discloses a biplane oil driven micropump based on a giant magnetostrictive film driver. The biplane oil driven micropump comprises a pump body, and a substrate dividing the pump body into an upper pump body and a lower pump body, wherein an upper plane spiral coil is arranged on the upper surface of the upper pump body; the upper plane spiral coil is electrically connected with an external power supply; a positive magnetostrictive effect film is arranged on the upper surface of the substrate; an inverse magnetostrictive effect film is arranged on the lower surface of the substrate; a liquid inlet and a liquid outlet are formed in the pump body; a valve cavity is arranged in the pump body; the substrate forms an upper liquid cavity with the upper pump body and forms a lower liquid cavity with the lower pump body; both the liquid inlet and the valve cavity are communicated with the upper and lower liquid cavities; the valve cavity is communicated with the liquid outlet; one-way liquid inlet films are arranged in positions where the upper and lower liquid cavities are connected with the liquid inlet; one-way liquid outlet films are arranged in positions where the upper and lower liquid cavities are connected with the valve cavity. The biplane oil driven micropump adopts double liquid cavities, and has a larger pump cavity in the condition of the same volumes, with the flow being larger than that of the conventional film micropump.

Description

technical field [0001] The invention relates to the technical field of micropumps, in particular to a double-planar coil-driven micropump based on a giant magnetostrictive film driver. Background technique [0002] Micro-mechanical systems (MEMS) have developed rapidly in recent years. As an important power component in micro-fluidic devices, micro-pumps are the core components of micro-flow control systems. Because it can accurately detect and control the flow, it has great application prospects in the fields of micro-delivery of drugs, micro-injection of fuel, synthesis of DNA, cooling of integrated electronic components, microchemical analysis, and propulsion of micro-satellites. At present, the drive methods that have been widely used in micropumps include electrostatic drive, electromagnetic drive, piezoelectric drive, thermal drive, bimetal effect drive, shape memory alloy drive, and thin-film giant magnetostrictive material drive. Piezoelectric drive and electrostati...

Claims

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Application Information

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IPC IPC(8): F04B43/04
Inventor 王传礼寇旗旗邓海顺何涛张辉
Owner ANHUI UNIV OF SCI & TECH
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