Micropump based on ultra-magnetostriction thin film actuator

Abstract

The invention discloses a micropump based on an ultra-magnetostriction thin film actuator. The micropump comprises a pump body and a base sheet dividing the pump body into an upper pump body and a lower pump body, the lower pump body is provided with a liquid inlet and a liquid outlet, a valve cavity is formed in the lower pump body, and a planar spiral coil is arranged on the upper surface of the upper pump body and electrically connected with an external power source; a liquid cavity is formed by the base sheet and the lower pump body and communicated with the liquid inlet and the valve cavity, the valve cavity is communicated with the liquid outlet, the connecting position of the liquid cavity and the liquid inlet is provided with a one-way liquid inlet film, and the connecting position of the liquid cavity and the valve cavity is provided with a one-way liquid outlet film; the base sheet is provided with a joule magnetostrictive effect thin film on the upper surface and provided with a reverse magnetostrictive effect thin film on the lower surface. The micropump is made of ultra-magnetostriction materials and therefore has the advantages of being high in response speed, high in frequency response and the like; the micropump is driven by a magnetic field provided by the planar coil, small in size and simple in structure, working performance of the micropump is improved substantially, the micropump is driven by the planar spiral coil, so that the structure of the micropump is simplified, and the size of the micropump is reduced.

Description

technical field [0001] The invention relates to a micropump, in particular to a micropump based on a giant magnetostrictive film driver. Background technique [0002] With the maturity of MEMS technology, the production cost of miniaturized devices is gradually reduced, and components with multiple functions can be integrated on the same chip, which makes miniaturized devices more and more popular among users. Microfluidic devices are widely used in analytical chemistry, medical diagnosis, drug sustained release, genomics, proteomics and other research fields. They have the advantages of less reagent consumption, low pollutant emission, fast chemical reaction speed, precise control of reaction, and portability. . From 2005 to 2011, the market value of the microfluidic field grew at an annual rate of 16%. By 2011, the market value of the entire microfluidic device had reached 5 billion euros. Microfluidic system is a branch of microelectromechanical system (MEMS), which is ...

AI Technical Summary

Problems solved by technology

In this technical solution, the electromagnet is in direct contact with the substrate, and there is an impact during operation, which generates noise and has a large volume.

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