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A vacuum recycling apparatus and method for refining solar grade polysilicon

A vacuum cycle refining, solar-level technology, applied in the growth of polycrystalline materials, chemical instruments and methods, crystal growth, etc.

Inactive Publication Date: 2013-04-24
孙文彬 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, the present invention does not use ascending pipes and descending pipes, which overcomes the problem caused by the movement of the same liquid without stirring

Method used

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  • A vacuum recycling apparatus and method for refining solar grade polysilicon
  • A vacuum recycling apparatus and method for refining solar grade polysilicon
  • A vacuum recycling apparatus and method for refining solar grade polysilicon

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Experimental program
Comparison scheme
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Embodiment approach

[0065] Implementation method: (please cooperate figure 1 shown)

[0066] 1. Heat and melt the solid 2N-4N metal silicon raw material to form a high-temperature liquid metal silicon solution L, and pour it into the silicon tank 12 .

[0067] 2. Put the silicon drum 12 filled with high-temperature liquid 2N-4N metal silicon melt into the vacuum chamber 11, and heat (about 1000°C-1800°C) to maintain the high-temperature liquid metal silicon solution 11.

[0068] 3. Insert the single-mouth connecting pipe 10 connected to the vacuum treatment furnace 2 of the circulation method into the silicon tank 12 of the vacuum chamber 11 of the vacuum degassing furnace 1 below, and extend into the liquid metal silicon melt to be connected to the vacuum treatment method of the circulation method Furnace 2, and vacuum treatment furnace 2 (about 1000 ° C ~ 1800 ° C) for the circulation method.

[0069] 4. After the second furnace is sealed, vacuumize at the same time, wherein the vacuum chambe...

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Abstract

A vacuum recycling apparatus for refining solar grade polysilicon is provided which contains a vacuum degassing (VD) device 1 and a vacuum recycling (RH) device 2. By storing liquid silicon L in a bucket 12 in the VD device 1, controlling the pressure inside the VD and RH devices 1 and 2, and introducing inert gas into the apparatus, the liquid silicon L is stirred for the removal of impurities. With the present invention, solar grade polysilicon can be directly produced with a specified purity, significantly reducing the production time and cost.

Description

technical field [0001] The invention relates to a device and method for refining solar-grade polysilicon, in particular to a device and method for refining solar-grade polysilicon through vacuum cycle treatment. Background technique [0002] There are two main uses of polysilicon products: one is for the preparation of solar cells, and the other is for integrated circuits. The requirements for the performance parameters of polysilicon products are not the same for the two uses. The purity of electronic grade polysilicon is required to reach 9N ~ 11N; while solar cells have less requirements for the purity of polysilicon under the premise of ensuring photoelectric conversion efficiency and life. High, roughly around 5N ~ 7N. [0003] Electronic-grade polysilicon generally uses high-cost chemical methods, mainly the modified Siemens method, while solar-grade polysilicon can use some physical methods to reduce production costs. At present, in addition to the improved Siemens ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/037
CPCC01B33/037H01L31/182Y02E10/546Y02P70/50C01B33/021C01B33/035C30B29/06B01J19/26
Inventor 孙文彬
Owner 孙文彬