Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

A fast polishing method for moving baffles

A moving baffle, fast technology, applied in the field of rapid polishing, can solve the problems affecting the stability of semiconductor production equipment, high procurement cost of related parts, and surface deterioration of parts, etc., to extend service life, reduce abnormal risks, and reduce crashes. effect of chance

Active Publication Date: 2016-03-30
湖州科秉电子科技有限公司
View PDF7 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to long-term use of the mobile baffle, the surface of the parts will gradually deteriorate, which will affect the stability of semiconductor production equipment over time; when this situation occurs, most of the processing methods are "scrap parts, new product purchases" The way
[0003] As we all know, the components related to semiconductor production equipment are all imported from abroad, and there is no domestic manufacturing capacity. Relatively, the procurement cost of related components is naturally high, and because they are imported from abroad, the procurement time is long. , when a large number of purchases are required, the huge cost of money and time is a heavy burden

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0018] The present invention will be further described below in conjunction with embodiment:

[0019] The present invention is used for the fast polishing method of moving baffle, comprises the following steps:

[0020] a. Use a sandblasting machine to spray the entire movable baffle, and the sprayed sand is alumina sand, and use sandblasting to evenly repair the scars on the surface of the mobile baffle due to multiple uses;

[0021] b. Use sandpaper to make preliminary repairs on the surface of the movable baffle to make the surface scars uniform;

[0022] c. Use abrasive cloth to recondition the surface of the moving baffle to make the surface scars more uniform;

[0023] d. Repeat steps b and c until the scars on the surface of the moving baffle disappear;

[0024] e. Use polishing agent to mirror the surface of the mobile baffle until the surface is as bright as new.

[0025] The above embodiments are only for the purpose of illustrating the present invention, rather t...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to a rapid polishing method for a movable baffle. The method includes spraying the entire movable baffle by means of abrasive blasting; trimming scratches evenly on the surface of the movable baffle; performing a primary trim on the surface of the movable baffle by abrasive paper, performing a secondary trim on the surface of the movable baffle by grinding cloth, and repeating the primary trim and the secondary trim until scratches on the surface of the movable baffle disappear; and performing mirror-surface treatment on the surface of the movable baffle until the surface becomes as bright as a new mirror surface. The rapid polishing method is simple to operate and the polishing process is simple. The movable baffle processed by the method can meet the using requirements and reduce failure probability of production equipment. The rapid polishing method can prolong service life of the movable baffle, and reduce time and money cost spent in discarding used products and purchasing new products.

Description

technical field [0001] The invention relates to a rapid polishing method for a moving baffle. Background technique [0002] The mobile baffle is one of the key core parts common in semiconductor thin film process equipment. Due to long-term use of the mobile baffle, the surface of the parts will gradually deteriorate, which will affect the stability of semiconductor production equipment over time; when this situation occurs, most of the processing methods are "scrap parts, new product purchases" The way. [0003] As we all know, the components related to semiconductor production equipment are all imported from abroad, and there is no domestic manufacturing capacity. Relatively, the procurement cost of related components is naturally high, and because they are imported from abroad, the procurement time is long , When a large number of purchases are required, the huge cost of money and time is a heavy burden. [0004] Therefore, what kind of polishing method to adopt to ach...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): B24B1/00
Inventor 徐国栋
Owner 湖州科秉电子科技有限公司
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com