Movement mechanism of one-dimensional micro-positioning platform

Abstract

The invention relates to a precision working stage, and discloses a movement mechanism of a one-dimensional micro-positioning platform. The movement mechanism comprises articulated mechanisms which are distributed in a plane and a piezoelectric actuator which drives the articulated mechanisms. The articulated mechanisms are four double-parallel multi-bar flexible mechanisms which respectively are A, B, C and D, wherein the double-parallel multi-bar flexible mechanism A and the double-parallel multi-bar flexible mechanism B are parallel to each other, vertical hinges at two ends of the double-parallel multi-bar flexible mechanism A and the double-parallel multi-bar flexible mechanism B are connected with the middle sections of the double-parallel multi-bar flexible mechanism C and the double-parallel multi-bar flexible mechanism D; the middle sections of the parallel double-parallel multi-bar flexible mechanism A and the double-parallel multi-bar flexible mechanism B are connected with the piezoelectric actuator; and the tail ends of the double-parallel multi-bar flexible mechanism C and the double-parallel multi-bar flexible mechanism D are fixedly connected with a working table through bolts. The problem of the prior art that translation scope of the whole device is reduced caused by slant of displacement due to out-of-balance of stress of the middle portion of a micro-positioning device is solved, the movement mechanism of the one-dimensional micro-positioning platform has the advantages of being high in sharpness of separation, good in system rigidity, capable of improving movement scope and the like.

Description

technical field [0001] The invention relates to a precision workbench, in particular to a motion mechanism of a one-dimensional micro-motion platform. Background technique [0002] The current precision workbench is mostly realized by two-layer drive of macro motion and micro motion. The realization forms of the fretting part include flat springs, flexible hinges, sliding guides, air-floating guides and hydraulic guides, etc. The flexible hinge has the advantages of simple structure, compactness, no lubrication, no friction, no backlash, etc., and the piezoelectric actuator has the advantages of high displacement resolution, fewer intermediate transmission parts, high efficiency, high rigidity, and fast response, so the piezoelectric The driver-driven micro-motion table with flexible hinges has the advantages of compact structure, simplicity, and reliability, and is most widely used. [0003] The precision workbench realized by flexible hinges mostly adopts the form of dou...

AI Technical Summary

Problems solved by technology

[0005] In order to solve the problem that the force imbalance of the middle part of the micro-motion device in the prior art leads to the oblique displacement and the reduction of the translational range of the whole device, the purpose of the present invention is to provide a motion mechanism for a one-dimensional micro-motion platform

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