Realize 150mm high-precision large-stroke tool inching feed and detection device based on ultrasonic motor

Abstract

The invention provides an ultra-precision large-stroke cutter micro-motion feeding device based on an ultrasonic motor. The ultrasonic motor obtains motion and a matrix of the ultra-precision large-stroke cutter micro-motion feeding device through inverse piezoelectric effect and ultrasonic vibration of piezoelectric ceramics, micro deformation of material is amplified through mechanical resonance and is coupled in a friction mode, and the micro deformation of the material is converted into macroscopic motion of a rotor. The ultra-precision large-stroke cutter micro-motion feeding device based on the ultrasonic motor has the advantages that low-speed high torque is output, power density is high, start-stop control performance is good, direct drive and accurate positioning can be directly achieved, the ultrasonic motor and a ball screw is combined together, and the problem that feeding accuracy and large-stroke feeding can not be simultaneously taken into consideration during displacement of the cutter and feeding is solved. According to the ultra-precision large-stroke cutter micro-motion feeding device based on the ultrasonic motor, the high precision rotary type ultrasonic motor and the precision ball screw are adopted to carry out feeding, wherein THK guide stroke of the precision ball screw is 2mm, a high precision micrometer head which is 5nm in Renishaw resolution ratio and an indium steel grating ruler which is small in deformation coefficient are used for carrying out detection, wherein a linear ball guide bushing of THK and an optical axis are adopted to guarantee straight-line feeding in a guiding part, and high-precision large-stroke cutter feeding is achieved, wherein stroke of the high-precision large-stroke cutter feeding is 150mm.

Description

technical field [0001] The invention relates to a high-precision and large-stroke cutter micro-feeding and detection device based on an ultrasonic motor, and belongs to the technical field of cutter feeding devices. Background technique [0002] In recent years, with the rapid development of ultra-precision machining, microelectronics technology, aerospace and other disciplines, the machining accuracy of its system components has become higher and higher, and the machining accuracy of parts depends to a large extent on the displacement accuracy of machine tools. The feed accuracy is the top priority. For example, in ultra-precision machining, in order to obtain high-precision shape and size of parts and ultra-smooth machined surface, in addition to having ultra-precision machine tools, high-precision and high-resolution testing instruments, high-precision diamond tools and ultra-stable machining In addition to environmental conditions, it is also necessary to have a precisi...

AI Technical Summary

Problems solved by technology

[0007] The purpose of the present invention is to solve the problem that the existing technology cannot realize the feeding and detection of large-stroke precision tools

Further provide a device based on ultrasonic motor to realize 150mm high-precision large-stroke tool inching feed and detection device

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