Standard-static method for measuring piezoelectric coefficient of d15 of piezoelectric materials
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A piezoelectric material and piezoelectric coefficient technology, which is applied in the research field of functional materials and testing technology, can solve the problems of difficult operation and complicated process, and achieve the effect of easy operation, simple process and wide application range.
Inactive Publication Date: 2013-06-05
XIANGTAN UNIV
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I.Kanno et al. obtained the piezoelectric coefficient d15 (Appl.Phys.Express2(2009) 091402, Jpn.J.Appl.Phys.49(2010) 09MA07) of PZT film by laser Doppler vibrometer, this method Only applicable to the measurement of the piezoelectric coefficient of single-crystal piezoelectric thin films; T.Aoki et al. obtained the piezoelectric coefficient d of polycrystalline PZT thin films using scanning probe microscope measurements and finite element simulations 15 , its process is complicated and difficult to operate (Key Engineering Materials421-422(2010)95)
At present, it has not been found to use the positive piezoelectric effect to measure the piezoelectric coefficient d of piezoelectric materials. 15 report
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Embodiment 1
[0050] According to step 3, adjust the signal generator so that when the vibration frequency is 80Hz, the excitation voltages are 100, 200, 300, 400, 500, 600, 800 and 1000mV respectively. According to ANSYS finite element simulation, the resonant frequency is about 4KHz, which is much higher than the vibration frequency of the cantilever beam, so the cantilever beam can be considered as quasi-static. Using an accelerometer and a charge amplifier, it is possible to measure Figure 5 The relationship between the acceleration and the output charge is shown, so Q / a=8.523×10 -2 pC.s 2 / m, then Q F =Q / (Ma)=121.87pC / N.
[0051] According to step 4, according to Table 1, the piezoelectric coefficient of PZT-51 can be obtained as 678m / V. Comparing this result with the piezoelectric coefficient (700m / V) of the material provided by the manufacturer, the relative error is 3.1%; comparing it with the ANSYS finite element simulation piezoelectric coefficient (670m / V), the relative erro...
Embodiment 2
[0053] According to step 3, build figure 2 The display device measures the output charge of the piezoelectric laminated cantilever beam. Adjust the signal generator so that when the vibration frequency is 80Hz, the excitation voltages are 100, 200, 300, 400, 500, 600, 800 and 1000mV respectively. According to ANSYS finite element simulation, the resonant frequency is about 4KHz, which is much higher than the vibration frequency of the cantilever beam, so the cantilever beam can be considered as quasi-static. Using accelerometers and charge amplifiers, it is possible to measure Image 6 The relationship between acceleration and output charge is shown, so Q / a=6.126×10 -2 pC.s 2 / m, then Q F =Q / (Ma)=87.60 pC / N.
[0054] According to step 4, according to Table 2, the piezoelectric coefficient of PMN can be obtained as 656m / V. Comparing this result with the piezoelectric coefficient (660m / V) of the material provided by the manufacturer, the relative error is 0.6%; comparing ...
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Abstract
The invention discloses a standard-static method for measuring the piezoelectric coefficient of d15 of piezoelectric materials. The standard-static method comprises the following steps: (a) based on the beam theory of Timoshenko, by means of a piezoelectric laminated cantilever beam of an operating mode of d15, putting forward an experimental method principle model which can measure the piezoelectric coefficient of the d15 of the piezoelectric materials; (b), conducting horizontal polarization on a piezoelectricity block body, manufacturing a coplanar electrode structural piezoelectricity laminated cantilever beam, and enabling the cantilever to be in a d15 shearing operating mode by means of series circuit connection; (c) setting up an excitation vibration device, enabling the cantilever to obtain the excitation frequency which is far less than the resonant frequency and voltage, and measuring the harmonic vibration accelerated speed and the output electric charge under the standard-static condition of the cantilever beam; (d) substituting the structural size, the material parameter and the output electric charge of the cantilever bean into the principle model so that the piezoelectricity coefficient d15 of the piezoelectric materials can be estimated. The standard-static method for measuring the piezoelectric coefficient d15 of the piezoelectric materials has the advantages of being capable of measuring the piezoelectric coefficient d15 of the piezoelectric materials, simple in technology, easy to operate, capable of measuring the piezoelectric coefficient d15 of piezoelectric ceramic, piezoelectric crystal and piezoelectric film materials, and wide in application range.
Description
technical field [0001] The invention belongs to the research field of functional materials and testing technology, in particular to a method for measuring the piezoelectric coefficient d of piezoelectric materials. 15 quasi-static method. Background technique [0002] The piezoelectric effect of piezoelectric materials makes it widely used in micro-electromechanical systems (MEMS) such as precision instruments, sensors, accelerometers, energy harvesters, and actuators (Appl. Phys. Lett. 92 (2008) 152901). The study of piezoelectric materials in MEMS devices is helpful to the modeling and design of new functional devices, so it is very important to accurately measure the characteristic parameters of piezoelectric materials. [0003] At present, the methods for measuring the piezoelectric coefficient of piezoelectric materials are mainly divided into two categories, the principles of which utilize the inverse piezoelectric effect and the direct piezoelectric effect respectiv...
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