Micro-displacement thickness measurement method for lithium battery film
A lithium battery, micro-displacement technology, applied in measurement devices, instruments, optical devices, etc., can solve problems such as inability to accurately measure film thickness
Patent Information
- Authority / Receiving Office
- CN · China
- Current Assignee / Owner
- Publication Date
- 2013-06-12
Smart Images
Figure 1 Figure 2 Figure 3
Abstract
Description
Technical field
[0001] The invention relates to the technical field of laser detection of plate thickness micro-displacement, in particular to on-line measurement of film thickness micro-displacement of arbitrary coating length. Background technique
[0002] The traditional off-line, static and contact film thickness measurement technology of lithium battery coating machine cannot meet the requirements of dynamic measurement in modern processing, such as off-line shutdown thickness measurement affects production efficiency, gamma and X-ray thickness measurement will produce radiation, ultrasonic thickness measurement will Sensitive to the external environment. Therefore, online non-contact measurement is particularly important. Due to its small size, easy integration, high measurement accuracy, low requirements for the installation environment, and no need for safety protection measures, laser thickness measurement has become the mainstream of offline static measurement. ...
Examples
Embodiment 1
[0063] The micro-displacement thickness measurement method of lithium battery film of the present invention comprises the following steps:
[0064] Step 1. Static error suppression of laser thickness measuring device:
[0065] Step 1.1, take a gauge block with a thickness of M and place it in parallel between the upper laser sensor and the lower laser sensor of the laser thickness measuring device, and measure the distance data between the upper laser sensor and the upper surface of the gauge block, which is recorded as s 1 (n), measure the distance data between the lower laser sensor and the lower surface of the gauge block, denoted as s 2 (n), record the sampling times as n, n=1,2,...N, N is the maximum sampling times;
[0066] Step 1.2, according to the formula s(n)=M+s 1 (n)+s 2 (n), to obtain the vertical spacing data between the upper laser sensor and the lower laser sensor, denoted as s(n);
[0067] Step 1.3, adopting 7-layer wavelet processing to s(n), the obtained...
Embodiment 2
[0105] In the lithium battery film micro-displacement thickness measurement method of embodiment 1, the described 7-layer wavelet processing specifically includes the following steps:
[0106] Step a, adopt 7 layers of wavelet processing to s(n), record a 0 (n)=s(n), a 0 (n) is the coefficient that wavelet decomposition has not been carried out for the low frequency band;
[0107] Step b, calculate according to the following recursive formula:
[0108] a j ( n ) = Σ k = 2 n + 1 2 n + 8 ...