One-direction torsion and high-balance variable optical attenuator and preparation method thereof

Abstract

The invention discloses a one-direction torsion and high-balance variable optical attenuator which comprises a substrate, fixed comb tooth units, two movable electrode regions, a micromirror, movable comb tooth units and two support rods, wherein a cavity is arranged at the upper part of the substrate; a first silicon dioxide insulating layer is arranged between each movable electrode region and the substrate; one ends of the two support rods are respectively and fixedly connected with the micromirror; the other ends of the two support rods are respectively and fixedly connected with the movable electrode regions through torsion rods; the movable comb tooth unit is fixedly connected to the lateral surface of each support rod; the movable comb tooth units are positioned above the fixed comb tooth units; the fixed comb tooth unit is positioned on one side of each support rod; fixed comb teeth in the fixed comb tooth units and movable comb teeth in the movable comb tooth units are arranged in a staggered manner; and the micromirror, the movable comb tooth units, the support rods and the torsion rods are respectively positioned in a suspension state. The one-direction torsion and high-balance variable optical attenuator can realize accurate control over the torsion angle at any position; meanwhile, the invention also provides a preparation method for the one-direction torsion and high-balance variable optical attenuator; and the preparation method is simple, high in reliability and high in processing precision.

Description

technical field [0001] The invention relates to an attenuator and a preparation method thereof, in particular to a unidirectional twisted high-balance variable optical attenuator and a preparation method thereof. Background technique [0002] Variable Optical Attenuator (abbreviated as: VOA) is an important fiber optic passive device in optical network. It is a key component of optical amplifier and plays a key role in power balance in optical fiber communication system. Micro-Electro-Mechanical Systems (MEMS for short) variable optical attenuator has reliable performance, compact structure, low cost, easy mass production, and has broad development prospects. The current MEMS optical attenuator mainly has a micromirror structure, and the up and down deflection of the micromirror is realized through electrostatic drive. There are flat plate type and comb type drive structures. The flat type is difficult to achieve linear control, and the comb teeth need to overlap up and dow...

AI Technical Summary

Problems solved by technology

There are flat plate type and comb type drive structures. The flat type is difficult to achieve linear control, and the comb teeth need to overlap up and down. The processing of the upper and lower comb teeth involves alignment and isolation issues, so the process is relatively complicated. If the comb teeth are concentrated on one side, May cause structural asymmetry, easy to lose balance

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