The utility model discloses a device for improving microcrystal residues of an HJT
rework piece, which comprises a cleaning tank with an upper opening, an overflow port is arranged on the upper portion of the cleaning tank and communicated with an overflow pipeline, a
pipe valve and a
filter element assembly are arranged on the overflow pipeline, the overflow pipeline is communicated with a
circulating pump, the
circulating pump is communicated with a return pipeline, and a return port is arranged on the lower portion of the cleaning tank. The
backflow pipeline is communicated with the
backflow opening. The cleaning device has the advantages that due to the simple design principle, an original cleaning tank and an original cleaning mode do not need to be changed too much, and only components such as a
pipe, a valve and a pump need to be additionally arranged outside the tank; the liquid level and floating microcrystals are discharged and filtered, so that the problem of microcrystal floating object residues caused by no circulation of the tank body is solved, and the subsequent
silicon wafer processing yield is ensured; microcrystals in a traditional cleaning tank float and gather, the phenomenon that the microcrystals are attached to the
silicon wafers after being lifted is avoided, time and liquid
medicine wasted by repeated cleaning are reduced, and the risk of product scrapping is reduced.