Semiconductor processing device
A technology for processing equipment and semiconductors, applied in semiconductor/solid-state device manufacturing, liquid cleaning methods, electrical components, etc., can solve the problems of large equipment volume, affecting production throughput, high consumption of processing liquid and ultrapure water, etc. Reach the effect of reducing waste water discharge, convenient connection and reducing consumption
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[0027] In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0028] The term "one embodiment" or "embodiment" here refers to that specific features, structures or characteristics related to the embodiment can be included in at least one implementation of the present invention. The appearances of "in one embodiment" in various places in this specification do not necessarily all refer to the same embodiment, nor do they necessarily refer to a separate or selected embodiment that is mutually exclusive of other embodiments. "Multiple" and "several" in the present invention mean two or more. "And / or" in the present invention means "and" or "or".
[0029] figure 1 A schematic structural view of the modularized semiconductor processing equipment 1 in the present invention is shown. Such as fig...
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