Reinforced diffusion plate and manufacturing method thereof

Abstract

The invention relates to a reinforced diffusion plate and a manufacturing method thereof. The manufacturing method includes a shaping processing step, a cleaning step, a stamping step, a surface treatment step and a cleaning step, the manufactured reinforced diffusion plate includes a connection portion used for the connection to an arrangement board of a film plating device, a bent portion connected with the connection portion, and a baseboard portion connected with the bent portion, and a plurality of through holes are formed on the baseboard portion. The bent portion, the connection portion and the baseboard portion cooperate with each other to define a shunting room, and the baseboard portion projects in an arc-shaped manner toward the center to the shunting room direction from the connection position with the bent portion. The above structural design of the baseboard reduces the heating bending deformation of the baseboard, and the reinforced diffusion plate can be recycled, so the material consumption cost is reduced.

Description

【Technical field】 [0001] The invention relates to a gas diffuser plate and its manufacturing method, in particular to a reinforced diffuser plate and its manufacturing method. 【Background technique】 [0002] refer to figure 1 , the existing gas diffusion plate 2 is arranged on the setting plate 11 of a coating device 1, and includes a plate body 21 for being arranged on the setting plate 11, and a gas chamber 22 surrounded and defined by the plate body 21, And a plurality of through holes 23 formed on the plate body 21 to communicate the air chamber 22 with the outside world. In actual use, the coating equipment 1 includes a heating seat 12 spaced apart from the existing gas diffusion plate 2, and an object to be plated 13 is placed on the heating seat 12, and then the gas is delivered into the gas chamber 22 , and the gas is distributed and output through the through holes 23, so that the gas can be evenly deposited on the surface of the object to be plated 13 after being...

AI Technical Summary

Problems solved by technology

[0003] refer to figure 2 Because the overall strength of the existing gas diffusion plate 2 is insufficient, and the distance from the heating seat 12 is quite close, the structural strength of the plate body 21 will be reduced in a high temperature environment. In addition, the gas located in the gas chamber 22 will expand when heated Afterwards, the plate body 21 will be pushed outwards

Therefore, the existing gas diffusion plate 2 is prone to bending deformation under the double influence of high temperature environment and gas pressure

[0004] When the existing gas diffusion plate 2 is bent and deformed, the output gas cannot be evenly deposited on the object to be plated 13, resulting in poor thickness uniformity of the coated film.

Therefore, the coating equipment 1 must be temporarily shut down to replace the new existing gas diffusion plate 2, but the shutdown will also cause the production capacity utilization rate of the coating equipment 1 to decrease

In addition, because the gas diffusion plate 2 needs to be replaced frequently, and cannot be reused repeatedly, the cost of consumables is increased

Images