Electric runout in-situ measuring device and measuring method for separating spindle rotation error
A technology of rotary error and measuring device, which is applied in the direction of measuring device, electric device, optical device, etc. It can solve the problems of difficult installation and adjustment, cumbersome operation of transposition method, long measurement period, etc., and achieve high-efficiency on-site measurement, high Flexible and versatile effect
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[0021] Such as figure 1 , figure 2 , image 3 , Figure 4 As shown, the electrical runout in-situ measurement device for separating the rotation error of the main shaft described in this embodiment mainly includes a laser displacement sensor 2, a first eddy current sensor 3, a second eddy current sensor 4 and an angle sensor 5. The outer side of the body 1 is provided with a laser displacement sensor 2, a first eddy current sensor 3 and a second eddy current sensor 4, the laser displacement sensor 2 is arranged in the middle position of the first eddy current sensor 3 and the second eddy current sensor 4, the first eddy current sensor The sensor 3, the second eddy current sensor 4 and the laser displacement sensor 2 are arranged on the same circumference, and the circumference where the first eddy current sensor 3, the second eddy current sensor 4 and the laser displacement sensor 2 are located is coaxial with the measured rotating body 1 , the angle sensor 5 and the secon...
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