The invention relates to an online projection objective
wave aberration detection device and method. The detection device comprises a
light source, a rotary scatterer, a first focusing lens, an
optical fiber array, a second focusing lens, a scattering optical element, an object plane optical
grating, an
image plane optical
grating, a two-dimensional
photoelectric sensor, a phase-shift control module and a computer, wherein the rotary scatterer is composed of a support, an
electric motor and a circular
diffusion scattering optical element, and is combined with the multimode
optical fiber array for converting a coherent light or partially coherent
light source into incoherent light; ten interference fringe patterns with phase shifting amounts of 0, pi / 6, pi / 3, pi / 2, 2pi / 3, 5pi / 6, pi, 5pi / 3, 3pi / 2 and 11pi / 6 respectively are acquired to calculate a phase position and the influence of multilevel
diffraction light interference of the optical
grating on the phase position extraction precision is eliminated. The device and the method can improve the
modulation effect of the object plane optical grating on the
optical field spatial coherence so as to achieve a high-precision alignment effect, reduce the
system error of phase position extraction in
wave aberration detection and improve the
wave aberration detection precision of an optical
system.