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Three-dimensional shape measuring apparatus

A three-dimensional shape, measuring device technology, used in measuring devices, using optical devices, microscopes, etc.

Active Publication Date: 2013-08-14
TAKAOKA TOKO
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In addition, the rotation deviation due to the eccentricity of the disk cannot be avoided, and the vibration generated by the continuous rotation of the disk cannot be avoided

Method used

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no. 1 example ）

[0027] figure 1 is a schematic overall diagram showing a structural example of the three-dimensional shape measuring device according to the first embodiment of the present invention. Note that in the following description, the case where the optical axis direction is set as the Z-axis direction and the directions perpendicular to the optical axis direction are set as the X-axis direction and the Y-axis direction will be described as an example.

[0028] The three-dimensional shape measuring device 10 includes an illumination optical system 11 having a light source 11a; an aperture plate 12 whose main surface is arranged perpendicular to the direction of the optical axis; an objective lens 13; a focal position changing portion 14; a mounting base 16 for mounting thereon a measurement Object 15. The three-dimensional shape measuring device 10 further includes a photodetector group 17 having a plurality of photodetectors 17a for receiving light beams reflected from the measurem...

no. 2 example ）

[0106] Next, a second embodiment of the three-dimensional shape measuring device according to the present invention will be explained.

[0107] Figure 9 is a schematic overall view of a structural example of a three-dimensional shape measuring device 10A according to a second embodiment of the present invention.

[0108] A three-dimensional shape measuring device 10A shown as the second embodiment differs from the three-dimensional shape measuring device 10 shown as the first embodiment in that the focal position changing section 14 is provided on the side of the aperture plate 12 with respect to the objective lens 13 . Since other structures and operations of the three-dimensional shape measuring apparatus 10A are similar to figure 1 The three-dimensional shape measuring device 10 is basically the same, and the same components and structures are denoted by the same reference numerals and letters, and explanations thereof are omitted.

[0109] A microscope is used in such ...

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Abstract

According to one embodiment, a three-dimensional shape measuring apparatus includes at least an aperture plate that is provided with a plurality of confocal apertures which are two-dimensionally arranged to have a predetermined arrangement period, and an aperture plate displacement portion that displaces the aperture plate at a constant speed in a predetermined direction perpendicular to the optical axis direction. Further, the aperture plate is provided with a cover member which is moved integrally with the aperture plate and which includes a transparent body allowing the light beams from the light source to pass therethrough and to be irradiated to the plurality of confocal apertures, and protects the plurality of confocal apertures from dust. Further, an imaging optical system, by which each of reflected light beams is guided to a photo-detector, is designed in consideration of optical properties of the whole optical system including the transparent body of the cover member.

Description

[0001] Cross References to Related Applications [0002] This application claims the benefit of priority from Japanese Patent Application No. 2012-022189 filed on February 3, 2012, the entire contents of which are incorporated herein by reference. technical field [0003] The embodiments described herein generally relate to a three-dimensional shape measuring apparatus that measures the three-dimensional shape of an object by using a confocal optical system. Background technique [0004] As one of methods for measuring a three-dimensional shape such as the surface shape of an object, there is a method of measuring the surface shape of an object by acquiring information on the height of each point on the surface of the object by using a confocal optical system. In measurement using a confocal optical system, measurement is performed for each point in principle, so a special tool for measuring the surface area is necessary. [0005] As such a technique for measuring a surface...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
CPCG01B11/24G02B21/008G02B21/0044G02B21/0028G02B21/006
Inventor 石原满宏
Owner TAKAOKA TOKO
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