Optical interference measurement device design and method thereof based on TRIZ (Theory of the Solution of Inventive Problems)
An interferometric measurement and optical interference technology, applied in the field of precision measurement, can solve problems such as restricting the ability of independent innovation and lack of core technology in the detection equipment industry, and achieve the effect of convenient operation and convenient production.
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[0013] in figure 1 In the experiment, the Jiman interferometer is analyzed. The interference fringe brightness of the Jiman interferometer is relatively high, but the distance between the two coherent beams A and B is related to the thickness of the parallel glass plate. Usually relatively small, which limits some experiments, so the adaptability of the instrument system is poor. According to the 2008TRIZ contradiction matrix table, the "adaptability" of the instrument system should be improved, but the "brightness" of interference fringes should be weakened (degraded). The engineering parameter numbers of "adaptability" and "brightness" are 32 and 23, respectively. In the matrix table, the number of the matrix element corresponding to the intersection of row 32 and column 23 is the recommended principle number of the invention, namely 1, 32, 35, 24, 17, 28, 26, 19. Based on the eight invention principles recommended by TRIZ as clues, seven of them are used to evolve the Jia...
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