Miniature F-P (Fabry-Perot) cavity tunable filter and method for manufacturing same

A tuning filter, F-P technology, applied in the field of micro-electromechanical systems, can solve the problems of high requirements, unfavorable production of F-P devices, no integrated process, etc., and achieves the effects of fast response speed, large deformation, and large tuning range.

Inactive Publication Date: 2015-06-10
HUAZHONG UNIV OF SCI & TECH +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

These production equipment requirements are high, which is not conducive to the production of F-P devices by units without ICP equipment, and this method is the integration of upper and lower two pieces, and there is no integrated process

Method used

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  • Miniature F-P (Fabry-Perot) cavity tunable filter and method for manufacturing same
  • Miniature F-P (Fabry-Perot) cavity tunable filter and method for manufacturing same
  • Miniature F-P (Fabry-Perot) cavity tunable filter and method for manufacturing same

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Experimental program
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Effect test

preparation example Construction

[0060] Figure 4 The top view of the prepared arrayed micro F-P cavity tunable filter provided by the embodiment of the present invention; from Figure 4 It can be concluded that the light leakage area is small, so that the fill factor of the tunable filter is high, and the optical performance of the tunable filter is good.

[0061] The core part of the filter unit of the miniature F-P cavity tunable filter provided by the embodiment of the present invention is a cantilever beam micro-bridge and a movable diaphragm (micro-bridge bridge deck), and the upper mirror is supported and suspended by the cantilever beam micro-bridge and the movable diaphragm. Above the lower reflector, the fixed diaphragm and the movable diaphragm of the filter base are DBR. When different voltages are applied between the fixed diaphragm and the movable diaphragm, the electrostatic force generated between the two acts on the cantilever beam micro-bridge, and the Move the upper reflector downward to c...

example 1

[0096] Example 1: A 3-5um infrared F-P cavity tunable filter array based on MEMS technology is designed by using the above scheme. This filter adopts a thin-film microbridge structure, which has the advantages of large tunable range and fast response speed, and is prepared by an integrated process. Table 1 is a table of design parameters for an infrared 3-5um F-P cavity tunable filter array.

[0097]

[0098] Table 1

[0099] The specific process implementation process of the designed 3~5um infrared micro F-P cavity tunable filter array is as follows: Figure 8 As shown, the preparation method specifically includes:

[0100] (1) cleaning the substrate surface and performing surface activation treatment;

[0101] (2) prepare the first Bragg reflector 3, and coat the anti-reflection film on the other side;

[0102] (3) make the first electrode 4 and the second electrode 5 on the face coated with the first Bragg reflector 3; AZ5214 glue is spin-coated on the DBR surface to...

Embodiment 2

[0111] Embodiment 2: In the design of Scheme 1, the spectral range for mid-wave infrared detection is 3-5um. In visible light imaging, the detection spectral range is 600-800nm. It was originally not applicable to design DBR and anti-reflection coatings, and The length of the F-P cavity needs to be changed to reduce the difficulty of the fabrication process.

[0112] Table 2 Design parameter list of F-P cavity tunable filter array for detecting visible light and detecting spectral range 600-800nm

[0113]

[0114] Table 2

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Abstract

The invention discloses a miniature F-P (Fabry-Perot) cavity tunable filter and a method for manufacturing the same. The miniature F-P cavity tunable filter comprises a substrate. An antireflection film is attached to one surface of the substrate, a first bragg reflector is attached to the other surface of the substrate, and a first electrode and a second electrode are attached onto the first bragg reflector; four metal piers are attached onto the first electrode, and a bridge surface is attached onto the four metal piers; the bridge surface comprises four cantilever beams and a movable diaphragm, each cantilever beam is L-shaped, one end of each cantilever beam is perpendicularly fixedly connected with the corresponding metal pier, and the other end of each cantilever beam is connected with the movable diaphragm; the movable diaphragm is square, and a second bragg reflector is inlaid in the center of the movable diaphragm; the first bragg reflector and the second bragg reflector form a resonant cavity of an F-P cavity; after the miniature F-P cavity tunable filter is powered on, the four cantilever beams elastically deform and can drive the movable diaphragm and the second bragg reflector to move in the direction perpendicular to the first bragg reflector, so that the length of the resonant cavity is changed, and a tunable function of the filter is realized. The miniature F-P cavity tunable filter and the method have the advantage that the filter is wide in tunable range and high in response speed.

Description

technical field [0001] The invention belongs to the technical field of micro-electro-mechanical systems, and more specifically relates to a micro F-P cavity tunable filter and a preparation method thereof. Background technique [0002] Hyperspectral imager research is a new topic in the field of imaging spectroscopy technology. It can obtain tens to hundreds of channel spectral images in narrow-band spectral bands with adjacent wavelengths and continuous sampling. Using this high spectral resolution Ultra-multispectral image data can identify many objects on the earth's surface according to their spectral characteristics, and has extremely high application value in economic construction and military affairs. [0003] The spectroscopic method of the traditional imaging spectrometer is to use dispersive elements such as prisms, gratings or Fourier transform spectrometers, and different spectra are imaged on different detectors. It is difficult to meet the needs of high spatia...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B26/00B81C1/00
Inventor 蒙庆华陈四海赖建军黄光吕超鸿黄鹰
Owner HUAZHONG UNIV OF SCI & TECH
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