Heterodyne laser interference angle vibration measuring method
A technology of laser interference and measurement method, which is applied in measurement devices, measurement of ultrasonic/sonic/infrasonic waves, instruments, etc., can solve the influence of non-stationary angular vibration measurement accuracy, low frequency range and accuracy, and difficulty in high-speed angular motion measurement large problems, to achieve good adaptability, high model demodulation resolution, and self-adaptive effects
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[0035] A heterodyne laser interferometry angle measurement vibration device, its structure is as follows figure 1 As shown, the system mainly consists of a polarizing laser 1, a beam splitter 2, a rectangular prism 3, an acousto-optic modulator 4, a mirror 5, a mirror 6, a rectangular prism 7, a mirror 8, a mirror 9, a grating 10, an objective lens 12, Reflector 13, reflector 14, photoelectric converter 15, data acquisition system 16, electronic computer 17 and so on.
[0036] The polarized laser 1 emits a laser beam, which is split by the beam splitter 2 to form two paths, and one path is reflected by the rectangular prism 3, and then enters the acousto-optic modulator 4 and the frequency is shifted by f c , and then enter the grating 10 through the mirror 5 and the mirror 6, and the ±1st-order reflected beam generated by the grating converges to the objective lens 12 and interferes with another beam of light. The other path passes through rectangular prism 7, reflector 8, a...
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