Calibration method oriented towards coaxial counterpoint micro-assembly system

A calibration method and micro-assembly technology, which can be applied to measurement devices, optical devices, instruments, etc., can solve problems such as being unsuitable for coaxial alignment micro-assembly systems, and achieve the effect of being simple and easy to implement and improving assembly accuracy.

Active Publication Date: 2013-10-23
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Claims
  • Application Information

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Problems solved by technology

In the traditional optical system, only the two rotational degrees of freedom of the object plane or the two rotational degrees of freedom of the camera affect the perpendicularity of

Method used

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  • Calibration method oriented towards coaxial counterpoint micro-assembly system
  • Calibration method oriented towards coaxial counterpoint micro-assembly system
  • Calibration method oriented towards coaxial counterpoint micro-assembly system

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Embodiment Construction

[0028] Below in conjunction with accompanying drawing and embodiment the present invention will be described in further detail: the flow process of the inventive method is as follows figure 1 shown. The principle of the coaxial alignment optical system in this embodiment is as follows figure 2 As shown, it includes a CCD camera and a microscope lens, an optical prism, a substrate stage, a target stage, and an angular displacement stage 1, an angular displacement stage 2, and an angular displacement stage 3. Due to the existence of the coaxial optical prism, the parts on the substrate stage and the target stage enter the image plane of the camera at the same time, and the edge recognition is performed on the two images respectively, and the pose deviation of the part is calculated, and the deviation is compensated to the substrate carrier The six-degree-of-freedom motion platform under the stage, after the compensation is completed, withdraws the prism, and the target stage m...

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Abstract

The invention relates to a calibration method oriented towards a coaxial counterpoint micro-assembly system, and belongs to the technical field of micro detection and micro assembly. An autocollimator is adopted. The calibration method oriented towards the coaxial counterpoint micro-assembly system comprises the steps of (1) calibrating the parallelism between a prism face and an imaging face of the autocollimator, (2) calibrating the perpendicularity between a reflected light path of a base body object stage and the imaging face of the autocollimator, and (3) calibrating the perpendicularity between reflected light rays of a target object stage and the imaging face of the autocollimator, (4) installing a CCD and a microscope lens after the autocollimator is disassembled, and carrying out fine adjustment to eliminate installation errors. The purpose that a CCD camera and the optical axis of a prism are perpendicular to the prism face is achieved, the calibration work of relative poses of components, including the prism, the target object stage, the base body object stage and the microscope lens, of the coaxial counterpoint micro-assembly system is accomplished, the assembly accuracy of the coaxial counterpoint micro-assembly system is greatly improved, and the calibration method oriented towards the coaxial counterpoint micro-assembly system is simple and easy to implement.

Description

technical field [0001] The invention relates to a calibration method for a coaxial alignment micro-assembly system, which belongs to the technical field of micro-detection and micro-assembly. Background technique [0002] The calibration of the coaxial alignment micro-assembly system is the premise of realizing the assembly of high-precision micro-miniature structural parts. Calibration before specific assembly plays a vital role in improving the success rate and accuracy of microstructure assembly. [0003] The development of micro-electromechanical systems (MEMS) technology has made the work objects of micro-assembly tend to be miniaturized and miniaturized, and the assembly accuracy is required to be at the micron or even sub-micron level. The introduction of micro-machine vision into the field of micro-assembly is currently the most A commonly used method for systems research. [0004] In the coaxial alignment system, the vertical relationship between the optical axis ...

Claims

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Application Information

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IPC IPC(8): G01B11/00
Inventor 叶鑫张之敬高军金鑫邵超
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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