Multi-shaft vacuum manipulator shafting precision testing device

Abstract

The invention provides a multi-shaft vacuum manipulator shafting precision testing device which is simple in structure, convenient to assemble and disassemble and high in practicability. The multi-shaft vacuum manipulator shafting precision testing device comprises a test board, a manipulator direct drive unit, an angle encoder installation support, an angle encoder, a connection flange and a laser displacement testing device. The manipulator direct drive unit is installed on the test board through a flange. One end of the angle encoder installation support is fixed to the test board through a bolt, and the angle encoder is installed at the other end of the angle encoder installation support through a bolt. One end of the connection flange is connected with a shaft of the manipulator direct drive unit, and the other end of the connection flange is connected with a shaft of the angle encoder through a flexible coupler. The flexible coupler compensates axial movement and non-alignment errors between the shaft of the angle encoder and the connection flange to prevent the shaft of the angle encoder from being stressed too much. The laser displacement testing device is composed of two laser displacement sensors and a two-dimension movable platform, and can regulate the measurement range. The multi-shaft vacuum manipulator shafting precision testing device has the advantages that the measurement precision is high, testing is convenient, the application range is wide and the testing cost is low.

Description

technical field [0001] The invention relates to a shafting precision testing device, in particular to a shafting precision testing device of a multi-axis vacuum manipulator. Background technique [0002] With the development of the semiconductor industry, cluster equipment and vacuum robots are becoming more and more important in the pursuit of improving production efficiency. At present, domestic cluster equipment and vacuum robot technology are in their infancy. The shafting accuracy of the vacuum robot is an important performance index of the robot. Whether it is in the development of the robot or in the production stage, in order to realize the performance testing and quality control of the vacuum robot, a simple, efficient, stable and reliable shafting accuracy is required. test device. [0003] At present, the most widely used shafting accuracy testing device is the measuring device using the eddy current displacement sensor. This kind of measuring device has low mea...

AI Technical Summary

Problems solved by technology

[0003] At present, the most widely used shafting accuracy testing device is the measuring device using the eddy current displacement sensor, which has low measurement accuracy and the measurement process is cumbersome and inconvenient to use

The measuring range of the existing eddy current displacement sensor shafting measurement device is not adjustable, and the measurement usually requires repeated installation and debugging, which is cumbersome to operate and very inconvenient to use, and repeated installation is likely to cause interference and affect the measurement accuracy

At the same time, due to the non-adjustable range, this kind of measuring device can only measure one shaft system, and the applicable range is narrow, and different measuring devices need to be installed for different shaft systems, which makes the measurement cost high

In addition, the existing eddy current displacement sensor measuring device can only be used for the measurement of metal materials, but cannot meet the measurement requirements of non-metallic material shafting

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