Etch first and then seal 3D system-on-chip front-mounted stacking package structure and process method
A system-level chip, etching first and sealing later technology, which is applied in semiconductor/solid-state device parts, semiconductor devices, electrical components, etc., can solve the problem that the quality of interconnection solder balls between packages is difficult to control, etc.
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Embodiment 1
[0199] Embodiment 1, single-layer line single-chip front-mounted single-turn pins
[0200] see Figure 27 , is a structural schematic diagram of Embodiment 1 of the three-dimensional system-on-a-chip stacked package structure of the present invention, which includes a base island 1 and pins 2, and the front side of the base island 1 is provided with a conductive or non-conductive adhesive material 3 There is a chip 4, the front of the chip 4 is connected with the front of the pin 2 with a metal wire 5, and a conductive pillar 6 is arranged on the front of the pin 2, the area around the base island 1, the base island 1 The area between pin 2 and pin 2, the area between pin 2 and pin 2, the area above base island 1 and pin 2, the area below base island 1 and pin 2, and chip 4, metal line 5 and The conductive pillars 6 are all encapsulated with a molding compound 7, the molding compound 7 is flush with the top of the conductive pillars 6, and the surface of the base island 1, th...
Embodiment 2
[0254] Embodiment 2, stacked J-shaped package body
[0255] see Figure 28 , is a structural schematic diagram of Embodiment 2 of the three-dimensional system-on-a-chip stacked package structure of the present invention that is etched first and then sealed. The difference between Embodiment 2 and Embodiment 1 is that the outer corner of the package body 9 is a J-shaped pin.
Embodiment 3
[0256] Embodiment 3, stacked L-shaped package body
[0257] see Figure 29 , is a structural schematic diagram of Embodiment 3 of the three-dimensional system-on-a-chip stacked package structure of the present invention, which is etched first and then sealed. The difference between Embodiment 3 and Embodiment 1 is that the outer corner of the package body 9 is L-shaped.
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