Vacuum chamber flap valve of continuous type vacuum film plating line

Abstract

The invention relates to a vacuum chamber flap valve of a continuous type vacuum film plating line. The flap valve is characterized by comprising a valve port, a valve plate, a main driving shaft, a connecting rod, a pivot shaft, an inclining angle adjusting device and a rotary driving mechanism, wherein the main driving shaft is rotationally supported on the wall surface of a vacuum chamber, the first end of the connecting rod is fixedly connected with the main driving shaft, the second send of the connecting rod extends to the back side of the valve plate, the pivot shaft is used for connecting the valve plate and the second end of the connecting rod, the inclining angle adjusting device consists of at least one pair of ejector pin mechanisms, each ejector pin mechanism comprises a pin hole, a sliding pin, an elastic element and a screw, each pin hole is formed in the second end of the connecting rod, each sliding pin is arranged in each pin hole in a penetrating way, one end, facing the back side of the valve plate, of each sliding pin is provided with each elastic element, the other end of each sliding pin is provided with each screw, then each screw is abutted against each sliding pin, the elastic element at the end of each sliding pin is abutted against the back side of the valve plate, the two ejector pin mechanisms are respectively arranged at the two sides of the pivot shaft in the length direction of the connecting rod, and the rotary driving mechanism is used for driving the main driving shaft to rotate. The flap valve has the advantages that the opening and closing actions are quick, the working is reliable, and the sealing effect is ensured.

Description

technical field [0001] The invention relates to the field of coating production machinery, in particular to a material inlet and outlet flap valve on a vacuum chamber of a continuous vacuum coating production line. Background technique [0002] Taking the continuous vacuum magnetron sputtering coated glass production line as an example, the coating chamber must be in a high vacuum state, and the glass substrate needs to enter and exit the coating chamber quickly, that is, the glass substrate must be in the atmosphere state - high vacuum state - atmospheric state. Fast switching between them for high productivity in the magnetron sputtering production process. The commonly used method is: arrange 2~3 vacuum chambers connected in series before and after the coating chamber, and increase / decrease the vacuum degree step by step, for example: in the three true chambers before the coating chamber, The target value of the pressure regulation of the first-stage vacuum chamber is se...

AI Technical Summary

Problems solved by technology

The sealing effect of the valve is directly related to the vacuum degree of each chamber and the formation of the vacuum gradient between the chambers, which affects whether the glass substrate can be quickly transported between the chambers and the stability of the vacuum degree of the coating chamber, and ultimately will Affect the production efficiency and coating quality of the whole line

[0003] In the prior art, there are many kinds of valves, but for the above occasions, it is necessary to consider the sealing performance of the valve, and secondly, the opening and closing speed and convenience of the valve. The existing conventional valves on the market are not very suitable.

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