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Dual-mode ultrasonic linear motor with high speed, high resolution ratio and high driving force

A linear motor, high-resolution technology, used in generators/motors, piezoelectric effect/electrostrictive or magnetostrictive motors, electrical components, etc., to solve problems such as inability to transmit energy

Inactive Publication Date: 2014-01-15
SOURCES SHANGHAI OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The standing wave ultrasonic motor uses the standing wave excited in the elastic body to drive the mover to move, but a single standing wave cannot transfer energy, because the particles on the surface of the elastic body vibrate in phase

Method used

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  • Dual-mode ultrasonic linear motor with high speed, high resolution ratio and high driving force
  • Dual-mode ultrasonic linear motor with high speed, high resolution ratio and high driving force
  • Dual-mode ultrasonic linear motor with high speed, high resolution ratio and high driving force

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Embodiment Construction

[0012] The specific implementation process of the present invention will be described below in conjunction with the accompanying drawings. For the sake of clarity and simplicity, detailed detailed descriptions of known functions and constructions in the devices described herein will be omitted when it may obscure the subject matter of the present invention.

[0013] Such as figure 2 As shown, the most basic driving vibrator unit of an ultrasonic motor is a stack of four piezoelectric ceramic sheets (PZT) arranged alternately in the polarization direction. Due to the characteristics of PZT unidirectional movement, bidirectional movement must be achieved by stacking alternately arranged polarization directions. Driven by positive pulse or negative pulse voltage, two PZTs of the same polarity move in one direction.

[0014] Such as image 3 As shown, the above 6 identical vibrator units and a total of 24 pieces of PZT are combined to form an array as the driving part of the m...

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PUM

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Abstract

The invention aims at providing a dual-mode ultrasonic linear motor with a high speed, a high resolution ratio and a high driving force. A basic principle is characterized in that inertia is used to realize linear movement under vibration and friction of a piezoelectric ceramic driver; and ultrasonic vibration energy is converted into translational kinetic energy of an object. An innovation point of the dual-mode ultrasonic linear motor provided in the invention is that two indexes of the high speed and high precision which can not be compatible traditionally are realized on same equipment. The motor can operate in an mm / s high speed mode and can operate in a high precision mode in which the resolution ratio is a nanometer scale. Simultaneously, the motor can work at an extreme low temperature, in an ultrahigh vacuum, in a high-intensity magnetic field and in other extreme conditions and possesses advantages that a stroke is large and a load is high.

Description

technical field [0001] The invention belongs to electromechanical products, and the motor can be widely used in fields requiring high-precision positioning technology, such as microscopic research fields such as semiconductor technology, optical fiber communication, micro-machines, genes and biotechnology. Background technique [0002] Traditional motors work on the basis of electromagnetic principles, converting electromagnetic energy into rotational energy. The ultrasonic motor is based on the use of the inverse piezoelectric effect of the piezoelectric material (ie, the electrostrictive effect) to convert electrical energy into ultrasonic vibration of the elastic body, and then convert it into the rotation or linear motion of the mover through friction transmission. Such as figure 1 As shown, the ultrasonic motor consists of two parts: the stator (vibrating body) and the rotor (moving body). When a high-frequency voltage is applied to the polarized piezoelectric ceramic...

Claims

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Application Information

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IPC IPC(8): H02N2/02H02N2/06
Inventor 殷立峰黄少华姜炎
Owner SOURCES SHANGHAI OPTOELECTRONICS TECH CO LTD
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