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Metal shield

A metal mask and mask technology, applied in the direction of metal material coating process, ion implantation plating, coating, etc., can solve the problems of flatness change, influence on liquid crystal molecules, surface wrinkles, etc., and reduce the occurrence of wrinkles. situation, changing stress distribution, and improving the effect of production yield

Active Publication Date: 2014-02-12
DARWIN PRECISIONS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
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Problems solved by technology

However, when the stretching force exceeds a critical value, the stress in the width direction is too large so that wrinkles appear on the surface of the conventional metal mask 10
Once the surface of the metal mask is wrinkled, the path of liquid crystal molecules passing through the mask body 12 is bound to be affected due to the change in flatness, resulting in poor evaporation quality
In order to avoid the above-mentioned situation of changing the flatness, the structure of the traditional metal mask still needs to be improved

Method used

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Embodiment Construction

[0034] The metal mask of the present invention makes the metal mask have different thickness distributions by forming recesses on the surface, and at the same time reduces the stress when the metal mask is stretched, thereby reducing the occurrence of wrinkles. The metal mask of the present invention can preferably be used in the vapor deposition manufacturing process of organic light emitting diode displays

[0035] Figure 2A It is a top view of the metal mask 100 of the present invention. like Figure 2A As shown, the metal mask 100 includes a mask section 110 and an end section 120 . The mask section 110 refers to the middle section of the metal mask 100 , including several mask bodies 112 and an outer frame portion 114 surrounding and connecting the mask bodies 112 . The part of the mask body 112 corresponding to the substrate during evaporation. The metal mask 100 can have a plurality of mask sections 110 and adjust the number of required mask bodies 112 according to...

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Abstract

The invention provides a metal shield comprising a shielding segment and an end part segment. The shielding segment is provided with a shielding body and an external frame part, which is connected with the shielding body in an encircled manner. The end part segment is connected with one end of the shielding segment. At least one of the shielding segment and the end part segment is provided with a concave part, which is disposed on the outer side of the shielding body. The ratio between the volume sum of the concave part and the volume sum of the shielding segment and the end part segment is in a range from 0.087 to 0.667.

Description

technical field [0001] The present invention relates to a metal shield; specifically, the present invention relates to a metal shield with tensile design. Background technique [0002] Due to the characteristics of low power consumption, thin thickness and self-illumination, organic light-emitting diode displays have attracted much attention in recent years. In the manufacturing process of OLED displays, the quality of the vapor deposition process will directly affect the pass rate of OLED displays, and the metal mask is one of the important components of the vapor deposition process. figure 1 is a top view of a traditional metal mask 10, such as figure 1 As shown, the conventional metal mask 10 is a long and narrow sheet with several mask bodies 12 along the extending direction. During the evaporation process, the position of each mask body 12 corresponds to a substrate. The mask body 12 has many fine hole structures, so that liquid crystal molecules can pass through the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04
CPCC23C14/042C23C14/12C23C14/24H10K71/166B05C21/005
Inventor 许桀豪谢丰仰
Owner DARWIN PRECISIONS CORP
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