Piezoelectric film bulk wave resonator electric field sensor

A technology of electric field sensor and piezoelectric film, which is applied in the field of electric field sensing, can solve the problem of low sensitivity and achieve the effect of high sensitivity of electric field measurement
CN112491383AInactive Publication Date: 2021-03-12彭彦莉
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
彭彦莉
Publication Date
2021-03-12
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention provides a piezoelectric film bulk wave resonator electric field sensor, which comprises a first piezoelectric body, a second piezoelectric body, a first electrode, a second electrode, afirst force application part, a second force application part and an organic conjugated polymer material, and is characterized in that a gap is formed between the first piezoelectric body and the second piezoelectric body, and the organic conjugated polymer material fills the gap; wherein the first electrode and the second electrode are respectively arranged on the side surfaces of the first piezoelectric body and the second piezoelectric body in the same direction, and the first force application part and the second force application part are respectively arranged on the outer sides of the first piezoelectric body and the second piezoelectric body. The method has the advantage of high electric field measurement sensitivity, and has a good application prospect in the field of electric field sensing.
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Description

technical field

[0001] The invention relates to the field of electric field sensing, in particular to a piezoelectric film bulk wave resonator electric field sensor. Background technique

[0002] The measurement of the electric field is not only of great significance to the launch of missiles, rockets, and aircrafts, but also to places on the ground that are prone to static electricity and are easily harmed by static electricity and radar, such as urban environmental pollution, ultra-clean laboratories, oil refineries, and oil storage stations. Applications. The sensitivity of traditional electric field measurement devices is low, and it is of great significance to explore electric field detection technology based on new principles to improve the sensitivity of electric field measurement. Contents of the invention

[0003] In order to solve the above problems, the present invention provides a piezoelectric thin film bulk wave resonator electric field sensor, comprising: a...

Claims

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