Piezoelectric film bulk wave resonator electric field sensor

A technology of electric field sensor and piezoelectric film, which is applied in the field of electric field sensing, can solve the problem of low sensitivity and achieve the effect of high sensitivity of electric field measurement

Inactive Publication Date: 2021-03-12
彭彦莉
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The sensitivity of traditional electric field measurement devices is low, and it is of great significance to explore electric field detection technology based on new principles to improve the sensitivity of electric field measurement

Method used

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  • Piezoelectric film bulk wave resonator electric field sensor
  • Piezoelectric film bulk wave resonator electric field sensor

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Embodiment 1

[0018] The invention provides a piezoelectric film bulk wave resonator electric field sensor, such as figure 1 As shown, it includes a first piezoelectric body 1 , a second piezoelectric body 2 , a first electrode 4 , a second electrode 5 , a first force applying part 6 , a second force applying part 7 , and an organic conjugated polymer material. A gap 3 is provided between the first piezoelectric body 1 and the second piezoelectric body 2 , and the gap 3 is rectangular. An organic conjugated polymer material fills the gap 3 . The organic conjugated polymer material is poly-3-hexylthiophene. When heated, the microscopic morphology of poly-3-hexylthiophene is more easily regulated by the electric field to be measured. The materials of the first piezoelectric body 1 and the second piezoelectric body 2 are aluminum nitride, zinc oxide, or lead zirconate titanate piezoelectric ceramics. In the present invention, the first piezoelectric body 1, the organic conjugated polymer ma...

Embodiment 2

[0021] On the basis of Embodiment 1, the first piezoelectric body 1 and the second piezoelectric body 2 are the same. The first piezoelectric body 1 and the second piezoelectric body 2 are arranged mirror-symmetrically with respect to the gap 3 . The first electrode 4 and the second electrode 5 are arranged mirror-symmetrically with respect to the gap 3 . That is, the entire device is mirror-symmetric about the gap 3, that is, at figure 1 , the device is left-right symmetrical. In this way, when the bulk acoustic wave resonates in the composite structure, the energy of the bulk acoustic wave will be concentrated in the gap 3; that is, in the gap 3, the vibration of the bulk acoustic wave is strong. When the molecular chain direction of the organic conjugated polymer material is changed, the resonant frequency of the bulk acoustic wave will be changed more, thereby achieving higher sensitivity electric field detection.

[0022] The width of the gap 3 is smaller than the wave...

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Abstract

The invention provides a piezoelectric film bulk wave resonator electric field sensor, which comprises a first piezoelectric body, a second piezoelectric body, a first electrode, a second electrode, afirst force application part, a second force application part and an organic conjugated polymer material, and is characterized in that a gap is formed between the first piezoelectric body and the second piezoelectric body, and the organic conjugated polymer material fills the gap; wherein the first electrode and the second electrode are respectively arranged on the side surfaces of the first piezoelectric body and the second piezoelectric body in the same direction, and the first force application part and the second force application part are respectively arranged on the outer sides of the first piezoelectric body and the second piezoelectric body. The method has the advantage of high electric field measurement sensitivity, and has a good application prospect in the field of electric field sensing.

Description

technical field [0001] The invention relates to the field of electric field sensing, in particular to a piezoelectric film bulk wave resonator electric field sensor. Background technique [0002] The measurement of the electric field is not only of great significance to the launch of missiles, rockets, and aircrafts, but also to places on the ground that are prone to static electricity and are easily harmed by static electricity and radar, such as urban environmental pollution, ultra-clean laboratories, oil refineries, and oil storage stations. Applications. The sensitivity of traditional electric field measurement devices is low, and it is of great significance to explore electric field detection technology based on new principles to improve the sensitivity of electric field measurement. Contents of the invention [0003] In order to solve the above problems, the present invention provides a piezoelectric thin film bulk wave resonator electric field sensor, comprising: a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/17G01R29/12
CPCG01R29/12H03H9/171
Inventor 不公告发明人
Owner 彭彦莉
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