A tray fastening device and plasma processing equipment

Abstract

The invention provides a tray fastening device and plasma processing equipment. The pallet fastening device is used to fix the workpiece to be processed on the bearing surface of the pallet and to fix the pallet on the upper surface of the support table. The pallet fastening device includes: a fastener and a force applying unit. The pallet has the same shape, the fastener is provided with a first through hole, the inner diameter of the first through hole is smaller than the outer diameter of the workpiece to be processed, and the first through hole is the same as the one on the pallet. The position of the workpiece to be processed is relatively; the fastener is connected to the force applying unit, driven by the force applying unit, the fastener overlaps with the pallet and squeezes the pallet, thereby The pallet is fixed on the upper surface of the support table, and at the same time, the workpiece to be processed is fixed between the pallet and the fastener. The fastening device can simplify the film loading process and improve the film loading efficiency.

Description

technical field [0001] The invention belongs to the technical field of microelectronic processing, and in particular relates to a tray fastening device and plasma processing equipment. Background technique [0002] At present, patterned sapphire substrates (Patterned Sapphire Substrates, hereinafter referred to as PSS) are an effective method to improve the light extraction efficiency of GaN-based LED devices, and dry etching techniques such as plasma etching are common methods for patterning sapphire substrates. [0003] When processing a sapphire substrate, it is first necessary to fix the sapphire substrate on the upper surface of the supporting table by means of a fastening device. figure 1 A schematic diagram of the structure of the currently used fastening device, figure 2 It is a partial sectional view of the currently used fastening device. see figure 1 with figure 2 , the fastening device includes a tray 1' and a cover plate 2', and a plurality of recesses 4' ...

AI Technical Summary

Problems solved by technology

[0005] As can be seen from the above, the existing process of fixing the sapphire substrate 3' is cumbersome

More importantly, the sapphire substrate 3' is manually fixed between the tray 1' and the cover plate 2' by means of multiple fastening screws 6', which seriously affects the loading efficiency of the sapphire substrate 3'

Images