Optical interferometer used for detecting outer surface of cylinder

Abstract

The invention discloses an optical interferometer used for detecting the outer surface of a cylinder. A condensation convex lens is located between a laser and a collimation convex lens, and the focus of the condensation convex lens and the focus of the collimation convex lens coincide; a beam splitter located between the condensation convex lens and the collimation convex lens is used for dividing light of an auto-collimation convex lens into a first light beam and a second light beam; a standard optical flat is located on one side, back to the beam splitter, of the collimation convex lens, and the surface, back to the collimation convex lens, of the standard optical flat is a standard surface; an annular reflection inclined surface located at the center of an annular inclined surface reflector is arranged on the inner side in the circumferential direction of the annular inclined surface reflector, the to-be-detected cylinder is located in the annular inclined surface reflector, a rotary shaft of the annular inclined surface reflector, the axis of the cylinder and the axis of the optical flat coincide, and the annular reflection inclined surface of the annular inclined surface reflector and the outer surface of the cylinder are placed oppositely. According to the optical interferometer, the feature information of the inner surface of the whole stereoscopic cylinder can be obtained at a time, and test efficiency, accuracy and reliability are also greatly improved.

Description

technical field [0001] The invention relates to an optical detection device, in particular to an optical interferometer for detecting the outer surface of a cylinder. Background technique [0002] Optical interference technology is one of the most precise and effective testing technologies in modern times. It integrates the latest contemporary technologies, widely adopts the latest achievements in computer technology, laser technology, electronic technology, semiconductor technology and other fields, and can quickly and accurately complete the inspection of optical parts. Check with the system. In today's optical workshop, from the design, processing and inspection of optical parts to the assembly, calibration and testing of optical systems, interferometers have become an essential testing and inspection device that is easy to operate, reliable, high-precision, and intelligent. It plays an inestimable role in the mass production and inspection of optical components and syst...

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Problems solved by technology

[0003] However, existing interferometers often detect deviations in surface shape, such as curved or partially curved or concave-convex areas. For the detection of three-dimensional surface shape, repeated inspections are required, and all three-dimensional surface shapes cannot be obtained at one time; secondly, The detection accuracy and reliability of existing interferometers are easily affected by environmental factors such as external vibration, temperature, and airflow

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