A high-precision flexoelectric pressure sensor based on metal elastic elements

Abstract

The invention discloses a high-precision deflection electric type pressure sensor based on a metal elastic element. The sensor comprises the metal elastic element for measuring mechanical vibration generated by micro pressure, a deflection electric dielectric film is pasted on the top of the metal elastic element, an insulation layer is arranged on the periphery of the metal elastic element, an upper metal electrode and a lower metal electrode are arranged on the upper surface and the lower surface of the deflection electric dielectric film respectively, the upper metal electrode and the lower metal electrode of the deflection electric dielectric film are connected with two output wires for measuring charge signals respectively, a pressure channel which is used for exerting pressure is formed below the metal elastic element, the deflection electric dielectric film, the upper metal electrode and the lower metal electrode are all arranged in an outer shell, and one end of each of two wires is led out from the outer shell. According to the sensor, the pressure on the film is measured through the linear relation between the exertion pressure and the mechanical deformation strain gradient of the metal elastic element, and the pressure measuring can be accurately and easily achieved.

Description

technical field [0001] The invention relates to the technical field of pressure sensors, in particular to a high-precision flexoelectric pressure sensor based on metal elastic elements. Background technique [0002] Traditional piezoelectric sensors are made using the phenomenon that certain dielectric materials have a piezoelectric effect. The piezoelectric effect means that when the dielectric is deformed by applying an external force (pressure or tension) in a certain direction, charges are generated on its surface so that non-electrical detection can be realized. Piezoelectric sensors have the characteristics of small size, light weight, and wide frequency band. They are suitable for the measurement of various dynamic forces, mechanical shocks and vibrations, and are widely used in mechanics, acoustics, medicine and aerospace. A piezoelectric sensor is a passive sensor. Piezoelectric sensors are usually made using the positive piezoelectric effect of piezoelectric mate...

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Problems solved by technology

Furthermore, in the small deformation of the load-bearing structure of the sensor, the strain is usually very small, which greatly increases the difficulty of detection, but the phenomenon of small deformation and large strain gradient is ubiquitous

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