A floating method of magnetic levitation permanent magnet planar motor based on pressure sensor group
A pressure sensor, permanent magnet plane technology, applied in the direction of magnetic attraction or thrust holding device, electrical components, etc., can solve the problems of high price, high installation and use requirements, limited measurement range, etc., to achieve convenient installation and use, and stable operation Reliable, low-hardware-cost results
Active Publication Date: 2015-12-02
扬中市检验检测中心
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Problems solved by technology
At present, incremental position sensors such as planar gratings can only detect the relative displacement of the mover, but cannot determine the position of the mover relative to the stator, so the phase of the levitation current cannot be determined
Using a micro-distance high-precision laser rangefinder can detect the position of the mover relative to the stator, and then determine the phase of the levitation current, but this equipment is expensive, requires high installation and use, and has a limited measurement range. Therefore, a new method is needed. Technical solutions to solve the above problems
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[0026] The present invention is further illustrated below in conjunction with the accompanying drawings and specific embodiments. It should be understood that these embodiments are only used to illustrate the present invention and are not intended to limit the scope of the present invention. After reading the present invention, those skilled in the art will understand various aspects of the present invention All modifications of the valence form fall within the scope defined by the appended claims of the present application.
[0027] Such as figure 1 As shown, a magnetic levitation permanent magnet planar motor levitation method based on a pressure sensor group. The magnetic levitation permanent magnet planar motor is composed of a stator 1 and a mover 2. The stator 1 is a permanent magnet array and the x axial, y The horizontal components of the axial direction are cosine distribution, the mover 2 is a coil array 3 and has no iron core. Such as figure 2 As shown, the coil...
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The invention discloses a pressure sensor group-based magnetic suspension permanent magnetic planar motor suspension method. The method comprises the following steps that four pressure sensors are arranged on the bottom surface of a mover, current is put into a driving unit, the pressure at the moment generated by the mover is measured by the pressure sensors to obtain a suspension force, the phase position of a suspension current can be determined by a dichotomy successive approximation method, and the corresponding current is put into a coil array according to the phase position of the suspension current to generate the required suspension force. The method has the advantages that the installation and use are convenient, the hardware cost is low, the working range is not limited by the stroke, the operation is stable and reliable, and the technical problem that the initial phase position of the mover relative to a stator cannot be determined by adopting a plane grating and other incremental position sensors in the prior art is solved.
Description
technical field [0001] The invention belongs to the technical field of electric power transmission, and in particular relates to a moving coil type magnetic levitation permanent magnet planar motor, which is a floating method of a moving coil type magnetic levitation permanent magnet planar motor based on a pressure sensor group, and is especially suitable for semiconductor photolithography and high-precision plotters , high-precision action table and other modern manufacturing equipment fields. Background technique [0002] With the rapid development of advanced manufacturing industry, modern precision and ultra-high-precision manufacturing equipment has an urgent demand for high-response, high-speed, high-precision planar drive devices. Compared with the traditional two-dimensional planar workbench, the direct-drive planar workbench with planar motor as the core has the advantages of simple structure, high positioning accuracy, and fast response speed. It has great applic...
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IPC IPC(8): H02N15/00
Inventor 张新华骆浩孙玉坤胡金春赵文祥
Owner 扬中市检验检测中心