A side wall heat compensation device of polysilicon directional solidification equipment
A technology of directional solidification and heat compensation, applied in the direction of polycrystalline material growth, crystal growth, chemical instruments and methods, etc., can solve the problems of high energy consumption, complex heating structure, difficult to maintain solidification front, etc., to save power consumption, simplify Structure, the effect of excellent purification effect
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Embodiment 1
[0025] The heating device (graphite heater) is installed 4-6mm higher than the upper part of the crucible. The upper opening of the cavity section of the heat compensation device is 30mm, the bottom length is 200mm, and the angle between the slope and the bottom surface is 78°. In the inner surface of the cavity, the inclined surface is made of high-density, high-temperature-resistant black fiber plate, and the surface roughness is between Ra6.3 and Ra12.5; the vertical surface in contact with the crucible is made of high-strength graphite plate, and the surface roughness is Ra3.2; the bottom surface of the cavity is made of ceramic material, the surface is polished, and the surface roughness is Ra0.1.
Embodiment 2
[0027] The heating device (graphite heater) is installed 8mm higher than the upper part of the crucible. The upper opening of the cavity section of the thermal compensation device is 20mm, the bottom length is 250mm, and the angle between the slope and the bottom surface is 73°. In the inner surface of the cavity, the inclined and vertical surfaces are made of high-strength graphite sheet, with surface roughness of Ra6.3 and Ra3.2 respectively; the bottom of the cavity is made of ceramic material, with surface polishing treatment, and surface roughness of Ra0.2.
Embodiment 3
[0029] The heating device (graphite heater) is installed 5mm higher than the upper part of the crucible. The upper opening of the cavity section of the thermal compensation device is 40mm, the bottom length is 220mm, the inclined surface is slightly concave, and the angle with the bottom surface is 75°. In the inner surface of the cavity, the slope is made of high-density, high-temperature-resistant black fiber plate with a surface roughness of Ra12.5; the vertical surface in contact with the crucible is made of high-strength graphite plate with a surface roughness of Ra1.6; The bottom surface of the body is made of ceramic material, the surface is polished, and the surface roughness is Ra0.05.
[0030] Basic principle of the present invention is as follows:
[0031] Take a certain section of the heat compensation device on the side wall, set the inner slope of the cavity as plane I, the vertical plane as plane II, the bottom plane as plane III, and the top heating device plan...
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Abstract
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