Arrayed micro gas chromatographic column chip with super-large contact area

Abstract

The invention discloses an arrayed micro gas chromatographic column chip with a super-large contact area. The chip comprises a silicon substrate (5), channels (2) and arrayed vertical pillars (3) processed on the silicon substrate (5), the arrayed vertical pillars (3) are distributed in the channels (2), a layer of porous silicon (7) grows on the surface of each of the channels (2) and the arrayed vertical pillars (3) through an electrochemical corrosion method after the arrayed vertical pillars (3) and the channels (2) are processed, and the surface of the porous silicon (7) is fixed with a stationary phase. The chip comprises a sealing layer (6) sealing the channels (2) on the silicon substrate (5) in a bonding manner. The porous silicon of the chip has a loose and porous structure, so the surface area of the chip increases thousands of times; and the surface of the porous silicon is fixed with the stationary phase, so the bonding area of the stationary phase in the chromatographic column can be greatly increased, and is 5-10 times higher than that the bonding area of the stationary phase in a chromatographic column having an empty channel structure. The change of the speed and the pressure of a gas flow in channels having the above structure is much smaller than the change of the speed and the pressure of a gas flow in chromatographic columns having the empty channel structure, so the mixed gas separation capability is greatly improved.

Description

technical field [0001] The invention belongs to the technical field of chromatographic analysis, and in particular relates to an arrayed micro-gas chromatography column chip with a super large contact area and a manufacturing method thereof. The invention is suitable for the separation of mixed gases and can be applied to field environmental monitoring, biochemical warfare agents, and food Safety, drug detection, early diagnosis of cancer, etc. Background technique [0002] The gas chromatographic column is one of the key components of the chromatographic analysis system, and its function is to realize the separation of mixed gases. Traditional gas chromatographic analysis systems mostly use packed columns or capillary columns, which are usually relatively long, occupy a relatively large volume space, and have a relatively slow analysis speed, making it difficult to meet the needs of on-site rapid analysis and detection. [0003] In order to meet the needs of on-site analys...

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Problems solved by technology

[0004] However, the existing miniature gas chromatographic column chips are limited in size due to the limited length of the chromatographic column. Therefore, the attachment surface area of ​​the stationary phase in the channel of the chromatographic column is relatively small, which limits the full contact between the mixed gas and the stationary phase; On the other hand, the micro-columns with empty channels have relatively large changes in the pressure ...

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