Thick film heater

Abstract

The invention relates to a thick film heater. The thick film heater comprises a thick film heating disk, a heating disk pressing block, a heat conduction disk and a heating pool, wherein the heating disk pressing block is arranged on the lower portion of the thick film heating disk, the heat conduction disk and the heating pool are arranged on the top of the thick film heating disk, a gas groove is formed in the surface, making contact with the thick film heating disk, of the heating disk pressing block, a gas inlet connector and a gas outlet connector formed in the heating disk pressing block are communicated with the gas groove, the heating pool which is made of fluoroplastic or is provided with a fluoroplastic layer is provided with a pool cover and a flow guide plate, the flow guide plate on the heating pool is attached to the heat conduction disk, a cavity of the heating pool is divided by the flow guide plate to form a surrounding liquid flow channel, a liquid inlet connector and a liquid outlet connector are formed in the heating pool, and are communicated with the liquid flow channel, a first temperature sensor which is used for detecting the temperature of outlet liquid is installed on the side, with the liquid outlet connector, of the heating pool, the detection end of the first temperature sensor is arranged in the liquid flow channel, and a second temperature sensor is installed on the heat conduction disk. According to the thick film heater, the temperature of the liquid can be controlled conveniently, rapidly and accurately, operation is reliable, cleaning efficiency is improved, and maintenance is convenient.

Description

technical field [0001] The invention relates to a thick-film heater working in an acid-base environment, belonging to the technical field of liquid heating. Background technique [0002] Corrosive liquids are used in chemical etching and cleaning processes of semiconductor devices, and the cleaning process requires heating of the corrosive liquids. The electric heater used for heating corrosive liquid is to set the electric heating material in the stainless steel sleeve, and the metal magnesium oxide is set between the stainless steel sleeve and the electric heating wire, and the outer wall of the stainless steel sleeve is coated with polytetrafluoroethylene, and the stainless steel sleeve It is installed in the box or cylinder to heat the added corrosive liquid, although the electric heater with this structure has the advantages of corrosion resistance and large heating liquid volume. However, for cleaning some semiconductor devices, it is necessary to wash with a relative...

AI Technical Summary

Problems solved by technology

However, for some semiconductor device cleaning, it is necessary to wash with a relatively low temperature corrosive liquid first, and then use a relatively high temperature corrosive liquid for flushing, and the electric heater with this structure is not suitable

At present, one is cleaned with cleaning liquids of different temperatures through two processes, but there are problems of high cleaning cost and low cleaning efficiency; the other is cleaned by one process, and it is necessary to prolong the pause in the cleaning process due to the different temperatures of the cleaning liquids. Auxiliary time, to reduce the temperature of corrosive liquids

Since the corrosive liquid only depends on the ambient temperature to cool down after stopping heating, on the one hand, it is impossible to quickly adjust the liquid temperature, and on the other hand, it cannot accurately control the liquid temperature, which cannot improve the cleaning efficiency.

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