A vacuum electron microscope sample vacuum pre-reaction chamber

Abstract

The invention discloses a vacuum sample pre-reaction chamber of a vacuum electron microscope. The vacuum sample pre-reaction chamber comprises a bracket, and a vacuum cavity formed in the bracket, wherein a transfer sleeve is connected to the front end of the vacuum cavity, a sample rod is connected to the transfer sleeve, an extraction valve set connected with an external vacuum pump and a deflation valve set used for deflating a corrosive gas are arranged on one side of the vacuum cavity in parallel, a gas inlet channel which is used for introducing a reaction gas and is connected with an external gas cylinder is connected to the rear end of the vacuum cavity, and a gas inlet valve used for controlling switching on or off of the gas inlet channel is arranged on the gas inlet channel. According to the vacuum sample pre-reaction chamber, the use range of an environment transmission electron microscope can be widened, a sample can be processed to achieve a varied effect, the aging treatment of the sample, a high-pressure reaction, and the effect which can not be realized by original equipment such as reaction with the corrosive gas can be realized, and the basic scientific research is facilitated.

Description

technical field [0001] The invention relates to a vacuum pre-reaction chamber for a vacuum electron microscope sample. Background technique [0002] The transmission electron microscope projects the accelerated and concentrated electron beam onto a very thin sample, and the electrons collide with the atoms in the sample to change the direction, thereby producing solid angle scattering. The size of the scattering angle is related to the density and thickness of the sample, so images with different light and dark can be formed. Usually, the resolution of a transmission electron microscope is 0.1-0.2 nm, and the magnification is tens of thousands to millions of times. The in-situ environmental transmission electron microscope can realize real-time observation of sample changes in the electron microscope reaction chamber, including the reaction of the sample under the introduction of a specific atmosphere or the increase of the electromagnetic field. [0003] However, the envi...

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Problems solved by technology

[0003] However, the environmental transmission electron microscope is a high-precision equipment, the vacuum degree is generally 10-7Pa, and the cleanliness of the cavity is extremely high. It is not possible to do experiments with a vacuum degree of 0.1Pa and the ambient gas cannot be corrosive.

Most of the existing vacuum pre-reaction chambers are for chemical processes, etc., and the pre-reaction chambers that match the environmental transmission electron microscope have not been reported yet.

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