Experimental device for micro-dynamic regulation

Abstract

The invention discloses a micro-power adjusting test device which comprises a micro-power component (501), a positioning and adjusting system, a sensor system and a control system, wherein the micro-power component (501) is arranged on the positioning and adjusting system; the micro-power component (501) is internally provided with the sensor system; the control system is connected with the sensor system through signals.

Description

technical field [0001] The invention relates to an experimental device for adjusting micro-power, in particular to an experimental device for adjusting micro-power based on a micro-force source coupled with giant magnetostrictive materials and piezoelectric ceramic materials. Background technique [0002] At present, the development of MEMS is extremely rapid, but there are still some technical bottlenecks. [0003] One of the main problems facing MEMS technology is micro-assembly technology; most MEMS are composed of tiny parts of different materials and different processing methods. With the continuous miniaturization of parts, the processing and assembly of micro-systems become more and more difficult. higher. [0004] In the process of transportation, processing and assembly of parts, parts scrapped due to mechanical damage and thermal deformation damage account for a large proportion, especially when operating parts that are very sensitive to mechanical contact force o...

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Problems solved by technology

[0004] In the process of transportation, processing and assembly of parts, parts scrapped due to mechanical damage and thermal deformation damage account for a large proportion, especially when operating parts that are very sensitive to mechanical contact force or heat. When subjected to a small force or heat, it will be deformed or broken, seriously affecting the quality and output of the product, and greatly increasing the production cost

[0005] In order to solve the difficulties encountered in the micro-operation process, researchers have proposed a variety of micro-force driving forms, such as micro-force drives based on the working mechanisms of electrostatic force, electromagnetic force, piezoelectric effect, thermal expansion and shape memory alloys, etc., but these are aimed at Micro-operation solutions have their own advantages and disadvantages, and none of them can solve the difficulties encountered in the micro-operation process; in order to make better use of functional materials to achieve a more complete form of micro-force driving, one idea is to combine different functional materials , using their respective advantages to achieve a better micro-force driving effect; for example, the giant magnetostrictive material is coupled with the piezoelectric material, and the reverse magnetostrictive effect of the giant magnetostrictive material and the piezoelectric inverse effect of the piezoelectric material are used to make Micro power components can make the output of micro force more accurate and constant

[0006] However, due to its special reasons, the micro-dynamic device based on this principle cannot use the existing test device to test the micro-dynamic characteristics, and then cannot fully grasp its characteristics; Principle and other reasons, it is completely impossible to carry out corresponding characteristic tests on the above-mentioned micro-power devices, so a new type of micro-power testing device is urgently needed to carry out corresponding characteristic tests for the above-mentioned new micro-power devices, so as to promote the development of this new type of micro-power device. Development and application of micro power device

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