SMA (shape-memory alloy)-driven bistable reflector translation type raster light modulator and array thereof

Abstract

The invention relates to the technical field of a light modulator and specifically relates to a raster light modulator, a manufacturing method and an array thereof. The SMA (shape-memory alloy)-driven bistable reflector translation type raster light modulator comprises the following components: a substrate, an insulation layer on the substrate, a movable flat plate which is disposed above the insulation layer, is supported by a support beam, is provided with a reflection plane and is driven by bias applied to support beams to perform vertical motion up and down, the support beams and a fixation raster, wherein the central portions of beam bodies are connected with the movable flat plate, the beam bodies are made of an SMA, and the fixation raster covers a structure unit composed of the aforementioned parts. According to the invention, the SMA is utilized, the material can be deformed to a preset shape after electrical heating, a bistable characteristic is formed, the purposes of reducing position shifting caused by faster unstable state position residence and preventing adherence failure are achieved, at the same time, the driving voltages are low, the demodulator can be compatible to a conventional digital chip drive circuit, the stroke is large, and the driving force is large.

Description

technical field [0001] The invention relates to the technical field of optical modulators, in particular to a grating optical modulator and an array thereof. Background technique [0002] MOEMS (Micro-Opto-Electro-Mechanical Systems) technology is a further fusion of MEMS (Micro-Electro-Mechanical Systems) technology and optical technology, with inherent advantages, it can realize micro-optical components The integration with the control circuit has the advantages of mass production, low unit cost, small size, fast response, and reliable performance. At present, optical modulators based on MOEMS technology have achieved high-speed development and wide application due to their excellent performance. Typical examples include the digital micromirror device DMD of Texas Instruments and the grating light valve GLV of Silicon Photonics. Projection display, adaptive optics, sensor, optical communication, and miniaturized optical platform have also been widely used. Using MOEMS te...

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Problems solved by technology

[0003] Among the commonly used drives for MOEMS devices, electromagnetic drives and sparse-tooth drives are not suitable for grating optical modulators due to their large structures. Shape memory alloy SMA drives, compared with piezoelectric, electrostatic, and hot gas drive methods, have higher work density. It has the advantages of large recoverable strain, large deformation recovery stress, and low driving voltage, but when used in optical modulators, it must be designed comprehensively with the specific structure of the device to achieve good results. The starting point of this patent is to use the translational mirror The optical modulation characteristics of the vertical translation of the grating light modulator are organically combined with the stable bistable switching results of the shape memory of the SMA to solve the problem of working stability and adhesion failure of the grating light modulator

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