MOEMS bistable raster horizontal-moving-type light modulator and array thereof
A light modulator and bistable technology, applied in the direction of instruments, optics, optical components, etc., can solve the problems of reducing diffraction efficiency, fluctuation interference position drift, etc., and achieve the effect of simple implementation, not easy to drift, and stable position
Inactive Publication Date: 2014-06-25
CHONGQING UNIV
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Problems solved by technology
[0003] In view of this, in order to solve the above problems, the present invention proposes a bistable grating translational optical modulator manufactured by MOEMS technology, using a movable grating with a bistable characteristic support beam that can be switched under electrothermal drive Steady-state position avoids the problem that the grating stays in an unsteady-state position and is easily disturbed by power fluctuations to cause position drift and reduce diffraction efficiency. At the same time, it achieves the purpose of preventing adhesion failure, and has low stability requirements for the drive circuit and is easy to implement. , The advantages of low power consumption
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[0035] Preferred examples of the present invention will be described in detail below.
[0036] see figure 1 The MOEMS bistable grating translational optical modulator of this embodiment includes a silicon substrate 1 and an insulating layer 2 disposed on the silicon substrate, and the grating 6 is suspended above the insulating layer 2 through elastic support beams. The grating It is formed by covering a metal reflector on an elastic base. The elastic support beam is composed of a beam body 5 and a support column 4. Both ends of the beam body 5 are fixed on the insulating layer 2 through the support column 4. The middle part of the beam body is connected to The grating is fixedly connected. The beam body is a double-layer composite beam composed of materials with different thermal expansion coefficients. The bottom layer is preferably polysilicon, which forms compressive stress during processing. The top layer is preferably aluminum, which forms tensile stress during processin...
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The invention relates to the technical field of light modulators, in particular to a raster light modulator, a manufacturing method thereof and an array thereof. The MOEMS bistable raster horizontal-moving-type light modulator comprises a silicon substrate 1 and an insulation layer 2 on the silicon substrate 1. A raster 6 is supported above the insulation layer 2 through an elastic supporting beam in a suspending mode. The supporting beam comprises a beam body 5 and a supporting column 4. The middle portion of the beam body is connected with the raster. The beam body is a double-layer composite beam made of materials with different thermal expansion coefficients. A lower reflecting surface 3 is arranged under the raster. An external current driving device 7 can generate currents with different amplitudes and frequencies. The movable raster with the supporting beam with the bistable feature is used, bistable positions can be switched under electric heating driving, the problem that the raster stays at a non-stable position and is easily interfered by power supply fluctuation, so that position drifting is caused, and diffraction efficiency is lowered is avoided, meanwhile, the purpose that adhering efficacy losing is prevented is achieved, and the MOEMS bistable raster horizontal-moving-type light modulator has the advantages of being low in stability requirement, easy to achieve and low in power dissipation.
Description
technical field [0001] The invention relates to the technical field of optical modulators, in particular to a grating optical modulator, a manufacturing method and an array thereof. Background technique [0002] MOEMS (Micro-Opto-Electro-Mechanical Systems) technology is a further fusion of MEMS (Micro-Electro-Mechanical Systems) technology and optical technology, with inherent advantages, it can realize micro-optical components The integration with the control circuit has the advantages of mass production, low unit cost, small size, fast response, and reliable performance. At present, optical modulators based on MOEMS technology have achieved high-speed development and wide application due to their excellent performance. Typical examples include the digital micromirror device DMD of Texas Instruments and the grating light valve GLV of Silicon Photonics. Projection display, adaptive optics, sensor, optical communication, and miniaturized optical platform have also been wide...
Claims
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IPC IPC(8): G02B26/08
Inventor 张智海张文凯路远高玲肖
Owner CHONGQING UNIV