Corrosion-resistant pressure sensor based on PDMS piezoresistive and stainless steel capacitor
A technology of pressure sensor and capacitive sensing, which is applied to the measurement, instrumentation, and force measurement of piezoelectric resistance materials, and can solve the problems of unsuitable static force measurement, weak lateral bearing capacity, and unsuitable pressure detection, etc. Achieve excellent solid-state strain, strong corrosion resistance, improve measurement efficiency and accuracy
Inactive Publication Date: 2016-03-02
QUZHOU UNIV
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Problems solved by technology
Among them, the piezoresistive sensor is a sensor based on the piezoresistive effect, which is characterized by simple processing and easy measurement of the signal, especially suitable for the measurement of static force; the capacitive sensor is characterized by simple structure, high sensitivity, and fast dynamic response, but due to Charge leakage is difficult to avoid and is not suitable for static force measurement, but it has obvious advantages in transient force measurement; piezoelectric sensors based on the piezoelectric effect are characterized by small size and fast dynamic response, but there is also charge leakage, which is not It is suitable for the measurement of static force, and the lateral bearing capacity is weak, so it is not suitable for pressure detection in harsh environments
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[0027] The present invention will be further described below in conjunction with drawings and embodiments.
[0028] Such as figure 1 , figure 2 , Figure 8 , Figure 9 As shown, the sensor is composed of a corrosion-resistant housing 1, a combination of a PDMS piezoresistive sensing unit 2 installed in the corrosion-resistant housing 1 and a stainless steel capacitive sensing unit 3, wherein:
[0029] Corrosion-resistant shell 1: including hollow bolt head 4, stainless steel diaphragm 5, cover 6 and nut 7 are sequentially assembled into a closed cavity, and a closed cavity is formed after assembly, and the PDMS piezoresistive sensing unit 2 And the stainless steel capacitive sensing unit 3 is isolated from the corrosive liquid or gas environment.
[0030] Such as image 3 , Figure 4 , Figure 5 As shown, the PDMS piezoresistive sensing unit 2: from bottom to top consists of an insulating film 8, a PDMS piezoresistive layer 9 and an inert rubber upper electrode substra...
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Abstract
The invention discloses a corrosion resistant pressure sensor based on a PDMS piezoresistor and a stainless steel capacitor. The corrosion resistant pressure sensor comprises a closed corrosion resistant shell, a PDMS piezoresistive sensing unit and a stainless steel capacitive sensing unit, and the PDMS piezoresistive sensing unit and the stainless steel capacitive sensing unit are arranged in the corrosion resistant shell. The corrosion resistant shell is formed by assembling a hollow bolt head, a stainless steel membrane, a sealing cover and a nut in sequence. The PDMS piezoresistive sensing unit is composed of an insulation film, a PDMS piezoresistive layer and an inert rubber upper electrode substrate with a detection electrode on the lower surface. The stainless steel capacitive sensing unit is composed of a stainless steel film electrode plate with a hole in the center and a backup substrate. The piezoresistive type and capacitive type force-sensitive units are integrated in the sensor, second-order quantity measurement of static force and transient force is effectively achieved, and measuring efficiency and precision are improved. SS316 stainless steel is adopted as the corrosion resistant shell of the sensor, and the advantages of the good corrosion resistance and the like of the corrosion resistant shell meet pressure measuring requirements of the sensor in corrosive gas and liquid.
Description
technical field [0001] The invention relates to a pressure sensor, in particular to a corrosion-resistant pressure sensor based on PDMS piezoresistance and stainless steel capacitance. Background technique [0002] Pressure monitoring is a widely used field, and it has important applications in chemical automation, aerospace and automobile industries. The pressure sensor can be used to detect the air leakage of the cylinder, the pressure in the tire, the pressure difference in the engine, the temperature difference of the surface and the oil pressure, etc. Pressure sensors used in these fields not only have clear requirements for pressure measurement types such as static force and transient force, but also often work in extremely harsh environments, requiring high temperature and corrosion resistance. [0003] Currently commonly used pressure sensors include piezoresistive sensors, capacitive sensors, piezoelectric sensors, and the like. Among them, the piezoresistive sens...
Claims
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IPC IPC(8): G01L1/18G01L1/14
Inventor 余建平张玉良邓小雷李欣周兆忠
Owner QUZHOU UNIV