Spatial modulation Fourier transform infrared spectrometer based on grid beam splitter

Abstract

The invention relates to the field of spectral analysis instruments, in particular to a spatial modulation Fourier transform infrared spectrometer based on a grid beam splitter. The spatial modulation Fourier transform infrared spectrometer based on the grid beam splitter resolves the problems that movable components exist inside the structure of an existing spectrometer, so that the spectrometer is large in size and weight. The spatial modulation Fourier transform infrared spectrometer based on the grid beam splitter comprises a collimation system, a sample pool, an interference system, a beam contracting system and a detector, wherein the interference system comprises a multi-stage small-ladder micro reflection mirror, the grid beam splitter and a multi-stage large-ladder micro reflection mirror; the light emitted by an infrared light source is collimated by the collimation system and becomes infrared parallel light, and the parallel light is absorbed by samples of the sample pool and then split by the grid beam splitter into two coherent light beams; the two light beams enter the multi-stage large-ladder micro reflection mirror and the multi-stage small-ladder micro reflection mirror respectively, and then are reflected to the grid beam splitter through the multi-stage small-ladder micro reflection mirror; after the light reflected by the grid beam splitter passes through the beam contracting system, interference fringes are obtained on the infrared area-array detector; Fourier transform is carried out on the interference fringes, and then the spectral information of an object to be detected can be obtained.

Description

technical field [0001] The invention relates to the field of spectral analysis instruments, and relates to a novel spatially modulated infrared Fourier transform spectrometer system, in particular to a novel spatially modulated Fourier transform infrared spectrometer system based on grid-type beam splitters and multi-level stepped micromirrors. spectrometer. Background technique [0002] Due to its high luminous flux and multi-channel transmission capability, Fourier transform spectrometer is widely used in the analysis of material spectral characteristics. It can perform high-precision spectral measurement, perform qualitative or quantitative analysis, and detect unknown substances, so it has been widely used in many fields. At present, there is an urgent need for high-precision, miniaturized and lightweight Fourier infrared spectroscopy analysis systems in the fields of environmental and security monitoring, medical analysis and detection, space detection, meteorological ...

AI Technical Summary

Problems solved by technology

[0003] In order to solve the problem that there are movable parts in the structure of the existing spectrometer, which leads to its large volume and weight, expensive operation and maintenance costs, and the inability to realize real-time and on-line measurement, the present invention provides a spatial spectrometer based on a grid beam splitter. Modulated Fourier Transform Infrared Spectrometer

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