A large sheet washing machine
A cleaning machine and large-scale technology, applied in the field of cleaning machines, can solve the problems of affecting the physical characteristics of the wafer, difficult to separate, and the wafer is not clean, and achieve the effect of improving the production yield, reducing the impact and ensuring the quality.
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[0023] The present invention will be further described below in conjunction with accompanying drawing, protection scope of the present invention is not limited to the following:
[0024] Such as figure 1 Shown, a kind of large-scale cleaning machine, it comprises frame 6, high-pressure air-drying device 15, described frame 6 middle and lower part is erected with feeding workbench 7, a plurality of ultrasonic cleaning tanks 9 successively from right to left, this implementation There are two ultrasonic cleaning tanks 9 in the example, an ultrasonic vibrating plate, a slow pulling dewatering tank 10, and a conveying device 12. The ultrasonic vibrating plate is arranged below the ultrasonic cleaning tank 9 body, and the top of the frame 6 is provided with geared motor, guide rail 2 and single-arm manipulator 3, the single-arm manipulator 3 straddles the guide rail 2 and is driven by the geared motor to move the single-arm manipulator 3 horizontally on the guide rail 2, and the up...
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