A Two-Dimensional Self-Calibration Marker Detection and Alignment System
A technology for aligning systems and marking points, used in measuring devices, instruments, optical devices, etc., can solve the problems of high working environment requirements, long self-calibration process time, low signal acquisition frequency, etc. The effect of improved calibration effect and low environmental sensitivity
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[0022] The structure, principle and specific implementation of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0023] Please refer to figure 1 , figure 1 It is a schematic diagram of a two-dimensional self-calibration mark point detection and alignment system of the present invention. Such as figure 1 As shown, the two-dimensional self-calibration mark point detection and alignment system includes: a zero signal reader 1, a two-dimensional workbench 2, a grating ruler auxiliary calibration plate 3, a reading head detection part 4, and a measurement reference frame 5;
[0024] The zero signal reader 1 and the two-dimensional workbench 2 are connected to each other through signal lines; the grating ruler auxiliary calibration plate 3 includes: X direction channel 33, Y direction channel 34, marked with a zero mark point X-direction grating ruler 31, Y-direction grating ruler 32 marked with zero mark point, first...
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