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Double-ended tuning fork scanning probe probe system and its measurement method

A double-ended tuning fork and measurement method technology, applied in the field of micro-nano probes, can solve problems such as being unsuitable for measurement, and achieve the effects of avoiding energy leakage, large piezoelectric constant, and small energy coupling

Active Publication Date: 2017-05-17
HEFEI UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the effective length of the probe of the probe is only a few microns, which is not suitable for the measurement of micro-structured surfaces such as micro-steps and micro-grooves with large aspect ratios.

Method used

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  • Double-ended tuning fork scanning probe probe system and its measurement method
  • Double-ended tuning fork scanning probe probe system and its measurement method
  • Double-ended tuning fork scanning probe probe system and its measurement method

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Embodiment Construction

[0032] Such as figure 1 As shown, the double-ended tuning fork scanning probe probe system includes a rigid support 1 and a double-ended tuning fork 2. The double-ended tuning fork 2 is composed of two fork ends 21 and a pair of fork arms connecting the two fork ends. The double-ended tuning fork 2 One fork end 21 is connected to the bottom surface of the rigid support 1, and the other fork end 21 is a free end; the two fork arms 22 in the center of the fork arm are respectively perpendicular to the bottom surface of the rigid support 1 and arranged in parallel vertically; the free end of the double-ended tuning fork 1 is below the A tungsten probe 3 is fixed in the middle of the bottom surface.

[0033] Electrodes 4 are arranged around the pair of fork arms of the double-ended tuning fork 2 , and the double-ended tuning fork 1 is excited to resonate through the electrodes 4 .

[0034] The vibration mode of the double-ended tuning fork 2 is that under the excitation of the el...

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Abstract

The invention discloses a double-end tuning fork scanning probe measurement head system and a measurement method of the double-end tuning fork scanning probe measurement head system. The double-end tuning fork scanning probe measurement head system is composed of a rigidity support, a double-end tuning fork and a tungsten tipped probe. The rigidity support is a rigidity supporting piece of the whole scanning probe measurement head system and is used for fixing a whole measurement head mechanism and forming whole constraint on one fork end of the double-end tuning fork. One fork end of the double-end tuning fork is connected to the bottom face of the rigidity support, the other fork end of the double-end tuning fork serves as a free end, and the tungsten tipped probe with the large draw ratio is fixedly arranged in the middle of the bottom face below the free end. Electrodes are placed according to a periphery partition method and two fork arms of the double-end tuning fork are stimulated to be bent and vibrate in an opposite-phase mode in the thickness direction. The tungsten tipped probe is in contact with a sample in a touched mode in the vertical Z direction and changes of resonance signals of the fork arms are detected to express the touch degree of the tip end of the tungsten tipped probe and the surface of the sample. The double-end tuning fork scanning probe measurement head system can be used for high-resolution and non-destructive measurement on the surfaces of flexible materials and the like and surface appearance scanning on micro-devices such as micro-grooves and micro-steps with large depth-to-width ratios.

Description

technical field [0001] The invention relates to the field of micro-nano measuring heads, in particular to a double-ended tuning fork scanning probe measuring head system and a measuring method thereof. Background technique [0002] The characteristic size and physical properties of nano-devices and biomaterials require surface topography measurement not only to have nanometer-level measurement resolution, but also require the measurement force to be as small as possible. Scanning probe microscopy (SPM), represented by atomic force microscopy (AFM), has nanoscale resolution and is currently a high-resolution instrument widely used in microscopic-scale surface topography measurements. However, the effective length of the probe of the probe is only a few microns, which is not suitable for the measurement of micro-structured surfaces such as micro-steps and micro-grooves with large aspect ratios. Therefore, in order to solve this problem, it is also required that the typical di...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01Q70/00
Inventor 余惠娟黄强先韩彬胡小娟张蕤
Owner HEFEI UNIV OF TECH
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