A Four-leaf Aberration Deformable Mirror Device

Abstract

The invention discloses a four-leaf aberration deformation mirror device which belongs to the field of system aberration compensation of optical systems and aims at solving the problems that the mounting and the detection are difficult to perform and the moving rigid body displacement is large in the prior art. The device comprises an optical element, a deformable mirror frame, eight actuators, eight displacement sensors, an upper fixed plate and a lower fixed plate, wherein the optical element and the deformable mirror frame are connected to form a mirror frame component in an adhesion or compression mode; the upper fixed plate and the lower fixed plate are respectively fixed on the deformable mirror frame through screws; four actuators which are distributed at an angle of 90 degrees in the circumferential direction are arranged on the upper fixed plate; four actuators which are distributed at an angle of 90 degrees in the circumferential direction are arranged on the lower fixed plate; the eight actuators on the upper fixed plate and the lower fixed plate are distributed at an angle of 45 degrees; the actuators are arranged along the optical axis of the optical element; input displacement vertically acts on the deformable mirror frame; the eight displacement sensors are respectively arranged on the upper fixed plate and the lower fixed plate and are opposite to the eight actuators.

Description

technical field [0001] The invention belongs to the field of system aberration compensation of an optical system, in particular to the system aberration compensation in a lithography projection objective lens system, and in particular relates to a four-leaf aberration deformation mirror device capable of causing four-leaf aberration deformation of an optical element. Background technique [0002] For the manufacturing process of large-scale integrated circuits, projection lithography is the most critical process, which requires the use of projection lithography machines, and the projection objective lens is the core of projection lithography machines, and its performance directly determines the graphics transfer of lithography ability. [0003] During the assembly and use of the lithography projection objective lens, due to assembly errors or thermal loads, etc., the system will produce a certain four-leaf aberration, which will affect the optical performance of the projecti...

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Problems solved by technology

[0005] The purpose of the present invention is to propose a four-leaf aberration deformable mirror device, which solves the problems in the prior art that it is difficult to detect the displacement of the shrapnel and the displacement of the introduced rigid body is large

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