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A troubleshooting method and troubleshooting device for semiconductor equipment

A technology for semiconductors and equipment, applied in the field of troubleshooting methods and devices for semiconductor equipment, can solve problems such as inability to quickly and accurately determine the normal operation of hardware circuits of semiconductor equipment, troubles in troubleshooting, and other problems, so as to reduce equipment maintenance time and solve burnout problems. , the effect of reducing requirements

Active Publication Date: 2017-10-13
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The present invention provides a troubleshooting method and a troubleshooting device for semiconductor equipment to solve the problem that it is impossible to quickly and accurately determine whether the hardware circuit of the semiconductor equipment is working normally, which causes trouble for troubleshooting

Method used

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  • A troubleshooting method and troubleshooting device for semiconductor equipment
  • A troubleshooting method and troubleshooting device for semiconductor equipment
  • A troubleshooting method and troubleshooting device for semiconductor equipment

Examples

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Embodiment 1

[0060] refer to Figure 4 , which shows a flow chart of a semiconductor device troubleshooting method according to the present invention, and this embodiment may specifically include the following steps:

[0061] Step 100, adding a mark indicating the state of the hardware circuit at the end of the hardware circuit of the semiconductor device;

[0062] In order to accurately and timely understand whether the hardware circuit of the semiconductor device is working normally, so as to troubleshoot, this embodiment adds a mark indicating the state of the hardware circuit at the end of the hardware circuit of the semiconductor device, such as Figure 5 As shown, the indication of the state of the hardware circuit mentioned here may be a digital signal, or may be a physical component such as an indicator light, and it only needs to represent the state of the hardware circuit, which is not limited in this embodiment.

[0063] It should be noted that, the reason why this embodiment a...

Embodiment 2

[0075] refer to Figure 6 , which shows a flow chart of a semiconductor device troubleshooting method according to the present invention, which may specifically include the following steps:

[0076] Step 200, adding a digital input signal at the end of the hardware circuit of the semiconductor device to indicate the state of the hardware circuit, and uploading the digital input signal to the controller of the semiconductor device.

[0077] In this embodiment, a digital input signal is selected as an indicator indicating the status of the hardware circuit, and is added to the end of the hardware circuit. After the hardware circuit correctly executes the operation command, the digital input signal is uploaded to the controller of the semiconductor device. The following takes the operation command as an example to illustrate:

[0078] This embodiment adds the valve opening hardware circuit of the digital input signal such as Figure 7 shown, from Figure 7 It can be seen that ...

Embodiment 3

[0095] refer to Figure 9 , which shows a flow chart of a semiconductor device troubleshooting method according to the present invention, which may specifically include the following steps:

[0096] Step 300, adding an indicator light at the end of the hardware circuit of the semiconductor device to indicate the state of the hardware circuit.

[0097] In this embodiment, the indicator light is selected as a sign indicating the status of the hardware circuit, and is added to the end of the hardware circuit. After the hardware circuit correctly executes the operation command, the indicator light is on, and whether the hardware circuit is faulty can be judged based on whether the indicator light is on.

[0098] It should be noted that the above-mentioned selected indicator light is used as the identification of the state of the hardware circuit, which is especially effective for industries where the operator and the machine operate in the same space. In this embodiment, digital i...

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Abstract

The invention provides a troubleshooting method and a troubleshooting device for semiconductor equipment to solve the problem that it is impossible to quickly and accurately judge whether the hardware circuit of the semiconductor equipment is working normally, which causes troubles for troubleshooting. A method for troubleshooting a semiconductor device includes: adding an identifier at the end of a hardware circuit of the semiconductor device to indicate the state of the hardware circuit; sending an operation command to the hardware circuit, and the hardware circuit sets the The identification of the state of the hardware circuit; according to the identification of the state of the hardware circuit, it is judged whether the hardware circuit fails; when the hardware circuit does not fail, check other parts of the semiconductor device except the hardware circuit . The invention can lock faults faster, reduce equipment maintenance time, and improve the efficiency of troubleshooting.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a troubleshooting method and a troubleshooting device for semiconductor equipment. Background technique [0002] In the semiconductor industry, many devices are controlled remotely, that is, the operator only faces a computer that acts as a human-machine interface, and the real devices are in another room. How to display the state of the equipment timely and accurately on the man-machine interface in order to control the equipment is particularly important. The existing control methods for semiconductor equipment are as follows, taking the vacuum system as an example to illustrate: [0003] The vacuum system of the etching machine includes a vacuum obtaining device and a vacuum measuring device, wherein the vacuum obtaining device refers to a pump, and its function is to pump the chamber from the atmosphere to a vacuum. Dry etching requires a sufficiently high vacuum (mi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R31/28
Inventor 武小娟
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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