A Micropump Device Driven by Photostrictive Material

Abstract

The invention discloses a micropump device driven by photostrictive materials. The micropump device comprises pump diaphragms, ultraviolet sources, PLZT bimorphs, displacement amplification and horizontal moving mechanisms, pump cavities, water inlet valves, water outlet valves and the like. Pump drive amplifying mechanisms are connected with pumps through flexible hinges. The pumps and the pump drive amplifying mechanisms are symmetrically arranged. The water outlet valves of the two pump cavities are communicated with each other, and the water inlet valves are communicated with each other, namely the two pump cavities are connected in parallel. When the two sides of each PLZT bimorph are irradiated, the PLZT bimorphs bend leftwards or rightwards, and bending displacement is amplified and transferred through the displacement amplification and horizontal moving mechanisms to cause sinking or protruding of the pump diaphragms, so that the volumes of the pump cavities change, water is pumped, and the pump drive amplifying mechanisms are asynchronously controlled to achieve stability of liquid flow. By the adoption of the photic-driving micropump device, light-control non-contact control can be achieved, and electromagnetic interference can be avoided; the PLZT bimorphs directly convert optical energy into mechanical energy, the transmission error of intermediate machines is eliminated, the structure is simple and compact, and accurate control over liquid flow is facilitated.

Description

technical field [0001] The invention relates to a micro-pump device, in particular to a micro-pump device driven by photostrictive materials. Background technique [0002] Microfluidic system is an important branch of microelectromechanical system, which has broad application prospects in the fields of medicine, chemistry, biological engineering, aerospace and automobile engine fuel supply. The micropump is the core component of the microfluidic system, and it is the power element that realizes the supply of microflow, and can transmit the microflow accurately. At present, the volume change of the pump cavity is driven by the reciprocating change of the driving membrane, so as to realize the function of the pump. The driving methods of the driving membrane include piezoelectric, electrostatic, electromagnetic, bimetallic actuation, and shape memory alloy actuation. Piezoelectric drive has a small displacement, requires high driving voltage, and is susceptible to electromag...

AI Technical Summary

Problems solved by technology

Piezoelectric driving displacement is small, requires high driving voltage, and is susceptible to electromagnetic interference; electrostatic driving force is small, displacement is also small and requires high voltage; electromagnetic driving is limited by the size of the electromagnetic coil, and it is not easy to miniaturize the structure; bimetal Actuation uses thermal effects to drive two metals with different expansion coefficients to achieve actuation, but the actuation ability is weak, the efficiency is relatively low, and the working frequency is very low; shape memory alloys are driven by temperature changes, so the frequency is low and is greatly affected by temperature and poor controllability

[0003] In summary, the above methods have their own shortcomings, which affect the precise control of the flow rate of the micropump or limit the miniaturization of the micropump structure. In contrast, the light-driven micropump based on photostrictive materials embodies Its huge advantages, optical drive can realize remote non-contact control, no noise, no pollution and no electromagnetic interference, simple and compact structure, easy to realize the miniaturization of the structure, providing a broad application prospect for micropumps

But there is no relevant description in the prior art

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