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Sputtering device, method for forming film, and method for manufacturing organic light emitting displayer

A sputtering device and organic technology, applied in lighting devices, sputtering plating, electroluminescent light sources, etc., can solve the problem of difficulty in maintaining plasma discharge characteristics, and achieve the effect of improving the characteristics of deposited films

Active Publication Date: 2014-10-29
SAMSUNG DISPLAY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, when forming a thin film by a sputtering process, it is difficult to maintain the discharge characteristics of the plasma, and the formation of a thin film with desired characteristics is limited.

Method used

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  • Sputtering device, method for forming film, and method for manufacturing organic light emitting displayer
  • Sputtering device, method for forming film, and method for manufacturing organic light emitting displayer
  • Sputtering device, method for forming film, and method for manufacturing organic light emitting displayer

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Embodiment Construction

[0045] Hereinafter, the structure and operation of the present invention will be described in detail with reference to the embodiments of the present invention shown in the drawings.

[0046] figure 1 is a perspective view schematically illustrating a sputtering device according to an embodiment of the present invention, figure 2 Yes figure 1 Ⅱ-Ⅱ sectional view, image 3 Yes figure 1 Ⅲ-Ⅲ section view.

[0047] refer to Figure 1 to Figure 3 , the sputtering apparatus 100 roughly includes a chamber 101 , a rotary target 130 , an inner magnet member 150 , and an outer magnet member 190 .

[0048] The chamber 101 can be connected to a pump (not shown) to control the pressure atmosphere of the deposition process, and accommodate and protect the substrate S, the target 130 , the external magnet member 190 and the like. In addition, the chamber 101 may include one or more entrances (not shown) for taking the substrate S in and out. figure 1 Only the bottom surface of the cha...

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Abstract

The invention relates to a sputtering device used for carrying out a deposition procedure on a substrate and provides a sputtering device, a method for forming a film, and a method for manufacturing an organic light emitting displayer. The sputtering device comprises a cavity, a rotary target, an internal magnet part and an external magnet part. The cavity is provided with a substrate and comprises a deposition space for achieving the deposition procedure of the substrate. The rotary target is arranged in the cavity and is opposite to the substrate. The internal magnet part is configured in the rotary target. The external magnet part is arranged in the cavity and opposite to the substrate, and is arranged outside the rotary target and separated from the rotary target.

Description

technical field [0001] The present invention relates to a sputtering device, a method for forming a thin film using the device, and a method for manufacturing an organic light-emitting display device. More specifically, it relates to a sputtering device that can effectively perform a thin film forming process and is easy to improve the characteristics of a deposited film. The film forming method of the device and the manufacturing method of the organic light emitting display device. Background technique [0002] Semiconductor elements, display devices, and other electronic elements include a plurality of thin films. There are various methods for forming such a plurality of thin films, and the deposition method is one of them. [0003] Examples of deposition methods include sputtering (sputtering), chemical vapor deposition (CVD: chemical vapor deposition), atomic layer deposition (ALD: atomic layer deposition), and various other methods. [0004] In addition, among display...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35H01L51/56H05B33/10
CPCC23C14/3407C23C14/35H10K71/16H10K71/00
Inventor 崔丞镐
Owner SAMSUNG DISPLAY CO LTD